Abstract: Embodiments of the present disclosure relate to compositions and methods for forming metal films. In at least some embodiment, a composition of matter includes a metal-hydride precursor represented by a general formula (I), a general formula (II), or oligomers thereof, where M is a trivalent metal and each of R1, R2, R3, R3?, R4, and R4? independently include a C1-C20 unsubstituted alkyl group, a C1-C20 substituted alkyl group, a C1-C20 unsubstituted alkenyl group, a C1-C20 substituted alkenyl group, a C1-C20 unsubstituted alkynyl group, a C1-C20 substituted alkynyl group, a trialkylsilyl group, a substituted aromatic group, an unsubstituted aromatic group, a non-metal atom, a non-metal group, or combinations thereof.

Abstract: Embodiments disclosed herein include a via structure and methods of forming the via structure. In an embodiment, the via structure comprises a substrate and an opening through the substrate. In an embodiment, the opening has a first portion and a second portion under the first portion. In an embodiment, the via structure further comprises a lining on sidewalls of the first portion of the opening, and a via filling the opening. In an embodiment, the via has a first region with a first width and a second region with a second width, wherein the first width is smaller than the second width.

Abstract: Methods for depositing metal films using a metal halide precursor and diethyl zinc are described. The substrate is exposed to a first metal precursor and diethyl zinc to form the metal film. The exposures can be sequential or simultaneous. The metal films are pure with a low carbon content. The first metal precursor may be a metal halide selected from the group consisting of tantalum chloride, aluminum chloride, niobium chloride, titanium chloride, zirconium chloride, hafnium chloride, tungsten chloride, molybdenum chloride, tantalum bromide, aluminum bromide, niobium bromide titanium bromide, zirconium bromide, hafnium bromide, tungsten bromide, molybdenum bromide, tantalum fluoride, aluminum fluoride, niobium fluoride, titanium fluoride, zirconium fluoride, hafnium fluoride, tungsten fluoride, molybdenum fluoride, tantalum iodide, aluminum iodide, niobium iodide, titanium iodide, zirconium iodide, hafnium iodide, tungsten iodide, and molybdenum iodide.

Abstract: Exemplary methods of semiconductor processing may include providing a first precursor to a semiconductor processing chamber. A substrate may be disposed within a processing region of the semiconductor processing chamber. The first precursor may include one or more of niobium, tantalum, or titanium. The methods may include contacting the substrate with the first precursor. The contacting may form a layer of metal on the substrate. The methods may include providing a second precursor to a semiconductor processing chamber. The second precursor comprises oxygen. The methods may include contacting the layer of metal with the second precursor. The contacting may form a layer of metal oxide on the substrate. The layer of metal oxide may be one or more of niobium oxide, tantalum oxide, or titanium oxide.

Abstract: Embodiments disclosed herein include a via structure and methods of forming the via structure. In an embodiment, the via structure comprises a substrate and an opening through the substrate. In an embodiment, the opening has a first portion and a second portion under the first portion. In an embodiment, the via structure further comprises a lining on sidewalls of the first portion of the opening, and a via filling the opening. In an embodiment, the via has a first region with a first width and a second region with a second width, wherein the first width is smaller than the second width.