Patents by Inventor Je-Don Kim
Je-Don Kim has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 9831244Abstract: A method for manufacturing a semiconductor device includes forming an insulation film including a trench on a substrate, forming a first metal gate film pattern and a second metal gate film pattern in the trench, redepositing a second metal gate film on the first and second metal gate film patterns and the insulation film, and forming a redeposited second metal gate film pattern on the first and second metal gate film patterns by performing a planarization process for removing a portion of the redeposited second metal gate film so as to expose a top surface of the insulation film, and forming a blocking layer pattern on the redeposited second metal gate film pattern by oxidizing an exposed surface of the redeposited second metal gate film pattern.Type: GrantFiled: August 28, 2015Date of Patent: November 28, 2017Assignee: SAMSUNG ELECTRONICS CO., LTD.Inventors: Ju-Youn Kim, Je-Don Kim
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Patent number: 9640534Abstract: A method for manufacturing a semiconductor device is provided. The method includes forming an insulation film including a trench on a substrate, forming a first metal gate film pattern along side and bottom surfaces of the trench, forming a second metal gate film on the first metal gate film pattern and the insulation film, and forming a second metal gate film pattern positioned on the first metal gate film pattern by removing the second metal gate film to expose at least a portion of the insulation film and forming a blocking layer pattern on the second metal gate film pattern by oxidizing an exposed surface of the second metal gate film pattern.Type: GrantFiled: November 19, 2015Date of Patent: May 2, 2017Assignee: SAMSUNG ELECTRONICS CO., LTD.Inventors: Ju-Youn Kim, Je-Don Kim
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Patent number: 9349731Abstract: A method for manufacturing a semiconductor device includes forming an insulation film including a trench on a substrate, forming a first metal gate film pattern and a second metal gate film pattern in the trench, redepositing a second metal gate film on the first and second metal gate film patterns and the insulation film, and forming a redeposited second metal gate film pattern on the first and second metal gate film patterns by performing a planarization process for removing a portion of the redeposited second metal gate film so as to expose a top surface of the insulation film, and forming a blocking layer pattern on the redeposited second metal gate film pattern by oxidizing an exposed surface of the redeposited second metal gate film pattern.Type: GrantFiled: October 9, 2012Date of Patent: May 24, 2016Assignee: SAMSUNG ELECTRONICS CO., LTD.Inventors: Ju-Youn Kim, Je-Don Kim
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Publication number: 20160079243Abstract: A method for manufacturing a semiconductor device is provided. The method includes forming an insulation film including a trench on a substrate, forming a first metal gate film pattern along side and bottom surfaces of the trench, forming a second metal gate film on the first metal gate film pattern and the insulation film, and forming a second metal gate film pattern positioned on the first metal gate film pattern by removing the second metal gate film to expose at least a portion of the insulation film and forming a blocking layer pattern on the second metal gate film pattern by oxidizing an exposed surface of the second metal gate film pattern.Type: ApplicationFiled: November 19, 2015Publication date: March 17, 2016Inventors: JU-YOUN KIM, JE-DON KIM
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Publication number: 20150371989Abstract: A method for manufacturing a semiconductor device includes forming an insulation film including a trench on a substrate, forming a first metal gate film pattern and a second metal gate film pattern in the trench, redepositing a second metal gate film on the first and second metal gate film patterns and the insulation film, and forming a redeposited second metal gate film pattern on the first and second metal gate film patterns by performing a planarization process for removing a portion of the redeposited second metal gate film so as to expose a top surface of the insulation film, and forming a blocking layer pattern on the redeposited second metal gate film pattern by oxidizing an exposed surface of the redeposited second metal gate film pattern.Type: ApplicationFiled: August 28, 2015Publication date: December 24, 2015Inventors: JU-YOUN KIM, JE-DON KIM
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Patent number: 9214349Abstract: A method for manufacturing a semiconductor device is provided. The method includes forming an insulation film including a trench on a substrate, forming a first metal gate film pattern along side and bottom surfaces of the trench, forming a second metal gate film on the first metal gate film pattern and the insulation film, and forming a second metal gate film pattern positioned on the first metal gate film pattern by removing the second metal gate film to expose at least a portion of the insulation film and forming a blocking layer pattern on the second metal gate film pattern by oxidizing an exposed surface of the second metal gate film pattern.Type: GrantFiled: October 12, 2012Date of Patent: December 15, 2015Assignee: SAMSUNG ELECTRONICS CO., LTD.Inventors: Ju-Youn Kim, Je-Don Kim
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Patent number: 9059090Abstract: A method of fabricating a semiconductor device includes forming a first gate pattern and a dummy gate pattern on a first active area and a second active area of a substrate, respectively, the first gate pattern including a first gate insulating layer and a silicon gate electrode, removing the dummy gate pattern to expose a surface of the substrate in the second active area, forming a second gate pattern including a second gate insulating layer and a metal gate electrode on the exposed surface of the substrate, the first gate insulating layer having a thickness larger than a thickness of the second gate insulating layer, and forming a gate silicide on the silicon gate electrode after forming the second gate pattern.Type: GrantFiled: April 21, 2014Date of Patent: June 16, 2015Assignee: SAMSUNG ELECTRONICS CO., LTD.Inventors: Ju-Youn Kim, Hyun-Min Choi, Sung-Kee Han, Je-Don Kim
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Publication number: 20140227868Abstract: A method of fabricating a semiconductor device includes forming a first gate pattern and a dummy gate pattern on a first active area and a second active area of a substrate, respectively, the first gate pattern including a first gate insulating layer and a silicon gate electrode, removing the dummy gate pattern to expose a surface of the substrate in the second active area, forming a second gate pattern including a second gate insulating layer and a metal gate electrode on the exposed surface of the substrate, the first gate insulating layer having a thickness larger than a thickness of the second gate insulating layer, and forming a gate silicide on the silicon gate electrode after forming the second gate pattern.Type: ApplicationFiled: April 21, 2014Publication date: August 14, 2014Applicant: SAMSUNG ELECTRONICS CO., LTD.Inventors: JU-YOUN KIM, HYUN-MIN CHOI, SUNG-KEE HAN, JE-DON KIM
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Patent number: 8772146Abstract: A method of fabricating a semiconductor device includes forming a first gate pattern and a dummy gate pattern on a first active area and a second active area of a substrate, respectively, the first gate pattern including a first gate insulating layer and a silicon gate electrode, removing the dummy gate pattern to expose a surface of the substrate in the second active area, forming a second gate pattern including a second gate insulating layer and a metal gate electrode on the exposed surface of the substrate, the first gate insulating layer having a thickness larger than a thickness of the second gate insulating layer, and forming a gate silicide on the silicon gate electrode after forming the second gate pattern.Type: GrantFiled: August 28, 2012Date of Patent: July 8, 2014Assignee: Samsung Electronics Co., Ltd.Inventors: Ju-Youn Kim, Hyun-Min Choi, Sung-Kee Han, Je-Don Kim
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Publication number: 20140103403Abstract: A method for manufacturing a semiconductor device is provided. The method includes forming an insulation film including a trench on a substrate, forming a first metal gate film pattern along side and bottom surfaces of the trench, forming a second metal gate film on the first metal gate film pattern and the insulation film, and forming a second metal gate film pattern positioned on the first metal gate film pattern by removing the second metal gate film to expose at least a portion of the insulation film and forming a blocking layer pattern on the second metal gate film pattern by oxidizing an exposed surface of the second metal gate film pattern.Type: ApplicationFiled: October 12, 2012Publication date: April 17, 2014Applicant: Samsung Electronics Co., Ltd.Inventors: Ju-Youn KIM, Je-Don KIM
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Publication number: 20140099784Abstract: A method for manufacturing a semiconductor device includes forming an insulation film including a trench on a substrate, forming a first metal gate film pattern and a second metal gate film pattern in the trench, redepositing a second metal gate film on the first and second metal gate film patterns and the insulation film, and forming a redeposited second metal gate film pattern on the first and second metal gate film patterns by performing a planarization process for removing a portion of the redeposited second metal gate film so as to expose a top surface of the insulation film, and forming a blocking layer pattern on the redeposited second metal gate film pattern by oxidizing an exposed surface of the redeposited second metal gate film pattern.Type: ApplicationFiled: October 9, 2012Publication date: April 10, 2014Applicant: SAMSUNG ELECTRONICS CO., LTD.Inventors: Ju-Youn KIM, JE-DON KIM
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Publication number: 20140065809Abstract: A method of fabricating a semiconductor device includes forming a first gate pattern and a dummy gate pattern on a first active area and a second active area of a substrate, respectively, the first gate pattern including a first gate insulating layer and a silicon gate electrode, removing the dummy gate pattern to expose a surface of the substrate in the second active area, forming a second gate pattern including a second gate insulating layer and a metal gate electrode on the exposed surface of the substrate, the first gate insulating layer having a thickness larger than a thickness of the second gate insulating layer, and forming a gate silicide on the silicon gate electrode after forming the second gate pattern.Type: ApplicationFiled: August 28, 2012Publication date: March 6, 2014Inventors: Ju-Youn Kim, Hyun-Min Choi, Sung-Kee Han, Je-Don Kim
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Patent number: 8603873Abstract: A method for forming a bipolar junction transistor comprises forming a first well of a second conductive type for forming a collector region in a substrate including device isolation layers, wherein the substrate comprises a first conductive type, forming a second well of the first conductive type for a metal-oxide-semiconductor transistor of the second conductive type within the first well of the second conductive type, wherein the second well of the first conductive type is formed deeper than the device isolation layers, forming a shallow third well of the first conductive type for a base region within the first well of the second conductive type, wherein the shallow third well of the first conductive type is formed shallower than the device isolation layers, and simultaneously forming an emitter region within the shallow third well of the first conductive type and a plurality of collector contacts within the first well of the second conductive type by performing an ion implantation process for forming sourType: GrantFiled: June 4, 2010Date of Patent: December 10, 2013Assignee: Samsung Electronics Co., Ltd.Inventor: Je-Don Kim
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Publication number: 20110312152Abstract: Methods of fabricating integrated circuit devices include forming an integrated circuit capacitor on a substrate. This integrated circuit capacitor includes a lower capacitor electrode, a capacitor dielectric region on the lower capacitor electrode and an upper capacitor electrode on the capacitor dielectric region. The upper capacitor electrode has a smaller surface area relative to the lower capacitor electrode. An interlayer insulating layer is formed on the integrated circuit capacitor. This interlayer insulating layer is polished to have a planarized surface thereon that is spaced from an upper surface of the upper capacitor electrode by a first distance and spaced from an upper surface of the lower capacitor electrode by a second distance greater than the first distance.Type: ApplicationFiled: June 16, 2010Publication date: December 22, 2011Inventors: Yoon-Hae Kim, Je-Don Kim, Young-Mook Oh
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Publication number: 20100317165Abstract: A method for forming a bipolar junction transistor comprises forming a first well of a second conductive type for forming a collector region in a substrate including device isolation layers, wherein the substrate comprises a first conductive type, forming a second well of the first conductive type for a metal-oxide-semiconductor transistor of the second conductive type within the first well of the second conductive type, wherein the second well of the first conductive type is formed deeper than the device isolation layers, forming a shallow third well of the first conductive type for a base region within the first well of the second conductive type, wherein the shallow third well of the first conductive type is formed shallower than the device isolation layers, and simultaneously forming an emitter region within the shallow third well of the first conductive type and a plurality of collector contacts within the first well of the second conductive type by performing an ion implantation process for forming sourType: ApplicationFiled: June 4, 2010Publication date: December 16, 2010Inventor: JE-DON KIM
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Patent number: 7745882Abstract: A method for forming a bipolar junction transistor comprises forming a first well of a second conductive type for forming a collector region in a substrate including device isolation layers, wherein the substrate comprises a first conductive type, forming a second well of the first conductive type for a metal-oxide-semiconductor transistor of the second conductive type within the first well of the second conductive type, wherein the second well of the first conductive type is formed deeper than the device isolation layers, forming a shallow third well of the first conductive type for a base region within the first well of the second conductive type, wherein the shallow third well of the first conductive type is formed shallower than the device isolation layers, and simultaneously forming an emitter region within the shallow third well of the first conductive type and a plurality of collector contacts within the first well of the second conductive type by performing an ion implantation process for forming sourType: GrantFiled: December 16, 2005Date of Patent: June 29, 2010Assignee: Samsung Electronics Co., Ltd.Inventor: Je-Don Kim
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Publication number: 20080203444Abstract: A multi-finger transistor and method of manufacturing the same are provided. The multi-finger transistor includes two active regions, a multi-finger gate, a plurality of source regions and a plurality of drain regions. The two active regions are defined in a unit cell of a substrate. The multi-finger gate includes a plurality of gate fingers formed in the two active regions and a gate connector between the two active regions. The gate connector connects the gate fingers to each other. The source regions are formed in first portions of the two active regions adjacent to the gate fingers. The drain regions are formed in second portions of the two active regions adjacent to the gate fingers.Type: ApplicationFiled: February 20, 2008Publication date: August 28, 2008Inventors: Han-Su Kim, Je-Don Kim
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Publication number: 20060131693Abstract: A method for forming a bipolar junction transistor comprises forming a first well of a second conductive type for forming a collector region in a substrate including device isolation layers, wherein the substrate comprises a first conductive type, forming a second well of the first conductive type for a metal-oxide-semiconductor transistor of the second conductive type within the first well of the second conductive type, wherein the second well of the first conductive type is formed deeper than the device isolation layers, forming a shallow third well of the first conductive type for a base region within the first well of the second conductive type, wherein the shallow third well of the first conductive type is formed shallower than the device isolation layers, and simultaneously forming an emitter region within the shallow third well of the first conductive type and a plurality of collector contacts within the first well of the second conductive type by performing an ion implantation process for forming sourType: ApplicationFiled: December 16, 2005Publication date: June 22, 2006Inventor: Je-Don Kim