Patents by Inventor Je-Sup Lee

Je-Sup Lee has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Apparatus for treating thin film and method of treating thin film
    Patent number: 7833350
    Abstract: An apparatus for treating a substrate includes a stage adapted to receive the substrate; a gas shield facing the substrate and having a retention space, the gas shield including: a top plate; a bottom plate facing the substrate and having pump holes around the retention space; and a middle plate between the top and bottom plates and having a first gas path communicating with the retention space and a second gas path communicating with the pump holes; an energy source facing the top plate such that light emitted therefrom irradiates a part of the substrate through the retention space; a reaction gas supplier connected to the first gas path; and a pressure adjusting device connected to the second gas path.
    Type: Grant
    Filed: September 22, 2005
    Date of Patent: November 16, 2010
    Assignee: LG. Display Co., Ltd.
    Inventors: Jong-Chul Lee, Je-Sup Lee, Sang-Hyuck Park
  • Apparatus for treating thin film and method of treating thin film
    Publication number: 20060060140
    Abstract: An apparatus for treating a substrate includes a stage adapted to receive the substrate; a gas shield facing the substrate and having a retention space, the gas shield including: a top plate; a bottom plate facing the substrate and having pump holes around the retention space; and a middle plate between the top and bottom plates and having a first gas path communicating with the retention space and a second gas path communicating with the pump holes; an energy source facing the top plate such that light emitted therefrom irradiates a part of the substrate through the retention space; a reaction gas supplier connected to the first gas path; and a pressure adjusting device connected to the second gas path.
    Type: Application
    Filed: September 22, 2005
    Publication date: March 23, 2006
    Inventors: Jong-Chul Lee, Je-Sup Lee, Sang-Hyuck Park