Patents by Inventor Jean-Charles Guibert

Jean-Charles Guibert has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Microlithography method using a mask with curved surface
    Patent number: 7790333
    Abstract: A process for preparing a lithographic mask, including: making patterns on a plane mask, the plane mask having an SOI structure including a layer of semiconductor material, a buried layer of insulant and a substrate; and transferring the patterns and the mask to a curved support that includes at least one point of non-nil curvature.
    Type: Grant
    Filed: September 15, 2004
    Date of Patent: September 7, 2010
    Assignee: Commissariat a l'Energie Atomique
    Inventor: Jean-Charles Guibert
  • Microlithography method using a mask with curved surface
    Publication number: 20070092805
    Abstract: The invention relates to a process for preparing a lithographic mask, comprising: a stage for the making of patterns (10) on a plane substrate (12), a stage for transferring the patterns on to a support (16) that has a non-nil curvature on at least one point of its surface.
    Type: Application
    Filed: September 15, 2004
    Publication date: April 26, 2007
    Applicant: COMMISSARIAT A L'ENERGIE ATOMIQUE
    Inventor: Jean-Charles Guibert