Patents by Inventor Jean Claude Drouget

Jean Claude Drouget has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Slurry composition and method of chemical mechanical polishing using same
    Patent number: 6251150
    Abstract: The present invention provides a slurry composition for chemical mechanical polishing comprising spinel particles having the formula AO•xZ2O3 wherein A is at least one divalent cation, Z is at least one trivalent cation, and 0.01≦x≦100. The present invention also includes a method of chemical mechanical polishing the surface of a substrate using slurry compositions that include these spinel particles. The slurry compositions of the present invention provide the desired level of planarization and selectivity for both metal and oxide surfaces. In addition, the slurry compositions of the invention can be prepared such that they are substantially free of alpha phase alumina particles and other high hardness particles to produce a scratch-free polished surface.
    Type: Grant
    Filed: May 27, 1999
    Date of Patent: June 26, 2001
    Assignees: EKC Technology, Inc., Baikowski Chimie
    Inventors: Robert James Small, Maria Louise Peterson, Tuan Troung, Lionel Bonneau, Jean Claude Drouget