Patents by Inventor Jean G. M. Dussault

Jean G. M. Dussault has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for cleaning workpieces by ultrasonic energy
    Patent number: 4178188
    Abstract: A delicate workpiece, such as a semiconductor wafer is cleaned by supporting the workpiece on a shaft which is rotated. A film of liquid solvent is caused to continuously flow across the exposed workpiece surface while the workpiece is in rotation and ultrasonic energy is applied to the liquid film for causing cavitation in the solvent, thereby effecting cleaning of the workpiece surface. Upon shutting off the solvent and the ultrasonic energy, the workpiece is dried by spinning it at high speed.
    Type: Grant
    Filed: August 7, 1978
    Date of Patent: December 11, 1979
    Assignee: Branson Ultrasonics Corporation
    Inventors: Jean G. M. Dussault, Robert A. Geckle, William L. Puskas
  • Apparatus for cleaning workpieces by ultrasonic energy
    Patent number: 4064885
    Abstract: A delicate workpiece, such as a semiconductor wafer is cleaned by supporting the workpiece on a shaft which is rotated. A film of liquid solvent is caused to continuously flow across the exposed workpiece surface while the workpiece is in rotation and ultrasonic energy is applied to the liquid film for causing cavitation in the solvent, thereby effecting cleaning of the workpiece surface. Upon shutting off the solvent and the ultrasonic energy, the workpiece is dried by spinning it at high speed.
    Type: Grant
    Filed: October 26, 1976
    Date of Patent: December 27, 1977
    Assignee: Branson Ultrasonics Corporation
    Inventors: Jean G. M. Dussault, Robert A. Geckle, William L. Puskas
  • Ultrasonic cleaner
    Patent number: D266794
    Type: Grant
    Filed: March 30, 1981
    Date of Patent: November 2, 1982
    Assignee: Branson Ultrasonics Corporation
    Inventors: William L. Puskas, Jean G. M. Dussault