Abstract: A variable capacitance cell includes a hybrid coupler including a first port, a second port, a third port, and a fourth port. A first variable capacitance is connected to the second port. The first variable capacitance includes one or more first variable micro-electromechanical system (MEMS) capacitor. A second variable capacitance is connected to the third port. The second variable capacitance includes one or more second variable MEMS capacitors. Control signals are applied to the first and second variable capacitances to selectively change the capacitances of the first and second variable capacitances, thereby modifying a phase difference between a signal input at the first port and a signal output from the fourth port.

Abstract: A variable capacitance cell includes a hybrid coupler including a first port, a second port, a third port, and a fourth port. A first variable capacitance is connected to the second port. The first variable capacitance includes one or more first variable micro-electromechanical system (MEMS) capacitor. A second variable capacitance is connected to the third port. The second variable capacitance includes one or more second variable MEMS capacitors. Control signals are applied to the first and second variable capacitances to selectively change the capacitances of the first and second variable capacitances, thereby modifying a phase difference between a signal input at the first port and a signal output from the fourth port.