Abstract: A portal-type positioning device includes two parallel linear guides provided with integrated linear drives, which support a separate X-carriage in a manner that allows movement in the X-direction, as well as a cross beam which is connected to the two X-carriages and movably supports a carriage in a Y-direction that extends perpendicular to the X-direction, with the aid of an integrated linear drive. In addition, the positioning device has a tool holder, which is guided on the Y-carriage in a Z-direction and holds a tool for machining a workpiece situated in an X-Y plane, the tool being disposed next to the cross beam at an offset in the X-direction. A force frame disposed above the tool in the Z-direction transmits a process force acting on the tool to the carriages LX1, LX2 without deforming the cross beam by a torque. The process force is applied by an electromagnet which acts between the force frame and the tool holder.

Abstract: A positioning device is adapted for positioning a tool at a setpoint position on a flat substrate in an X-Y plane, the tool exerting a process force in its axial direction perpendicularly onto the substrate. The tool includes a multicomponent force sensor to measure unwanted process-force components in the lateral direction. The setpoint position of the tool is correctable by the positioning device such that the lateral process-force components are minimized.

Abstract: A positioning device is adapted for positioning a tool at a setpoint position on a flat substrate in an X-Y plane, the tool exerting a process force in its axial direction perpendicularly onto the substrate. The tool includes a multicomponent force sensor to measure unwanted process-force components in the lateral direction. The setpoint position of the tool is correctable by the positioning device such that the lateral process-force components are minimized.

Abstract: A portal-type positioning device includes two parallel linear guides provided with integrated linear drives, which support a separate X-carriage in a manner that allows movement in the X-direction, as well as a cross beam which is connected to the two X-carriages and movably supports a carriage in a Y-direction that extends perpendicular to the X-direction, with the aid of an integrated linear drive. In addition, the positioning device has a tool holder, which is guided on the Y-carriage in a Z-direction and holds a tool for machining a workpiece situated in an X-Y plane, the tool being disposed next to the cross beam at an offset in the X-direction. A force frame disposed above the tool in the Z-direction transmits a process force acting on the tool to the carriages LX1, LX2 without deforming the cross beam by a torque. The process force is applied by an electromagnet which acts between the force frame and the tool holder.

Abstract: An apparatus for testing integrated circuits includes a test probe having test contacts configured to be pressed onto electrical contacts of a substrate and a frame to which the test probe is attached. A substrate support is configured to hold the substrate. A magnetic element is configured to generate a force with which the test contacts are pressed onto the electrical contacts of the integrated circuit. The magnetic element includes at least three magnet actuators which each have a distance sensor associated therewith and which are arranged around the substrate support such that distances between the magnet actuators and the frame, and between the substrate support and the test probe, are adjustable.

Abstract: An apparatus for testing integrated circuits includes a test probe having test contacts configured to be pressed onto electrical contacts of a substrate and a frame to which the test probe is attached. A substrate support is configured to hold the substrate. A magnetic element is configured to generate a force with which the test contacts are pressed onto the electrical contacts of the integrated circuit. The magnetic element includes at least three magnet actuators which each have a distance sensor associated therewith and which are arranged around the substrate support such that distances between the magnet actuators and the frame, and between the substrate support and the test probe, are adjustable.

Abstract: The control circuit of an electric motor, which has at least one phase supplied with high voltage and has a defined high-voltage zone, is provided with a control for the supply current of the phase with a setpoint-value current, and has devices for measuring the supply current which generate a first analog signal whose value corresponds to the measured current, an electronic control unit being disposed in a low-voltage zone, and having an analog-to-digital converter for converting the first analog signal or another analog signal acting as the first analog signal, into a corresponding digital signal which is supplied to the electronic control unit. The measuring devices are formed by a bleeder resistor, which is disposed in series with the phase, as well as by a differential amplifier whose two inputs, respectively, are connected to two contacts of the bleeder resistor.

Abstract: The control circuit of an electric motor, which has at least one phase supplied with high voltage and has a defined high-voltage zone, is provided with a control for the supply current of the phase with a setpoint-value current, and has devices for measuring the supply current which generate a first analog signal whose value corresponds to the measured current, an electronic control unit being disposed in a low-voltage zone, and having an analog-to-digital converter for converting the first analog signal or another analog signal acting as the first analog signal, into a corresponding digital signal which is supplied to the electronic control unit. The measuring devices are formed by a bleeder resistor, which is disposed in series with the phase, as well as by a differential amplifier whose two inputs, respectively, are connected to two contacts of the bleeder resistor.

Abstract: An electronic circuit includes a linear amplifier unit having a first current feedback loop, assisted by a switched-mode amplification unit having a second current feedback loop. The inputs of the two units are connected so that they receive, at the same time, a current setpoint in an operating mode in order to generate a fixed current across a load connected to the output of the units. The first feedback loop includes a first sensor to measure the current in the load, a first subtractor element to subtract the first measured current from the current setpoint, a first controller connected to the output of the first subtractor element and controlling a linear amplifier, which supplies the first output current to the load. The second feedback loop includes a second current sensor to measure a second current supplied to the load, between a connecting node of two switches connected in series to a supply voltage source and an inductor whose output is connected to the load.

Abstract: A method is provided for adapting controller parameters of a drive to different operating states. A control loop includes a PID controller whose I gain factor is adapted to a drive velocity and/or whose D gain factor is adapted to a drive current, and consequently to a drive load. The I gain factor is determined based on the drive velocity and the D gain factor is determined based on the drive current, in each case at least in one area, the I gain factor falling with the drive velocity and the D gain factor rising with the drive current.

Abstract: An electronic circuit includes a linear amplifier unit having a first current feedback loop, assisted by a switched-mode amplification unit having a second current feedback loop. The inputs of the two units are connected so that they receive, at the same time, a current setpoint in an operating mode in order to generate a fixed current across a load connected to the output of the units. The first feedback loop includes a first sensor to measure the current in the load, a first subtractor element to subtract the first measured current from the current setpoint, a first controller connected to the output of the first subtractor element and controlling a linear amplifier, which supplies the first output current to the load. The second feedback loop includes a second current sensor to measure a second current supplied to the load, between a connecting node of two switches connected in series to a supply voltage source and an inductor whose output is connected to the load.

Abstract: A linear guide with an integrated linear motor, the linear guide having a stationary support extending in a guide direction, a table movable in the guide direction and a linear motor. The linear motor includes 1) a movable element connected with the table, 2) a stationary element connected with the stationary support and contactless bearings between the stationary support and the table and 3) an electromagnetic positioner based on electromagnetic interaction for positioning the table transversely in relation to the guide direction. The linear guide includes an integrated position-measuring system having a scale and scanning heads which detect a position of the table in the guide direction and a deviation direction, which lies transversely in relation to the guide direction and parallel in relation to a plane of an air gap of the linear motor. The electromagnetic positioner acts in such a way so that the table is positioned in the deviation direction.

Abstract: A method is provided for adapting controller parameters of a drive to different operating states. A control loop includes a PID controller whose I gain factor is adapted to a drive velocity and/or whose D gain factor is adapted to a drive current, and consequently to a drive load. The I gain factor is determined based on the drive velocity and the D gain factor is determined based on the drive current, in each case at least in one area, the I gain factor falling with the drive velocity and the D gain factor rising with the drive current.

Abstract: A linear guide with an integrated linear motor, the linear guide having a stationary support extending in a guide direction, a table movable in the guide direction and a linear motor. The linear motor includes 1) a movable element connected with the table, 2) a stationary element connected with the stationary support and contactless bearings between the stationary support and the table and 3) an electromagnetic positioner based on electromagnetic interaction for positioning the table transversely in relation to the guide direction. The linear guide includes an integrated position-measuring system having a scale and scanning heads which detect a position of the table in the guide direction and a deviation direction, which lies transversely in relation to the guide direction and parallel in relation to a plane of an air gap of the linear motor. The electromagnetic positioner acts in such a way so that the table is positioned in the deviation direction.