Patents by Inventor Jean-Philippe M. Bourgoin

Jean-Philippe M. Bourgoin has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Cantilever deflection sensor and use thereof
    Patent number: 5804709
    Abstract: A new method and an apparatus for measuring the deflection of or the force exerted upon a cantilever-type micromechanical element is presented which is based on detecting radiation emitted from the gap between the cantilever (220) and a second surface (230, 231). The radiation, while occurring spontaneously at high frequencies when appropriately biasing the cantilever and the second surface by a voltage, can be enlarged by using external energy sources. The new method and apparatus is also applied to surface investigation, particularly to dopant profiling.
    Type: Grant
    Filed: October 3, 1996
    Date of Patent: September 8, 1998
    Assignee: International Business Machines Corporation
    Inventors: Jean-Philippe M. Bourgoin, Matthew B. Johnson, Bruno Michel