Abstract: The disclosure provides a system, comprising: a MEMS capacitive transducer, comprising one or more first capacitive plates coupled to a first node and one or more second capacitive plates coupled to a second node; biasing circuitry coupled to the first node, operable to provide a biasing voltage to the one or more first capacitive plates; and test circuitry coupled to the second node, operable to: selectively apply one or more current sources to the second node, so as to charge and discharge the MEMS capacitive transducer and so vary a signal based on a voltage at said second node between an upper value and a lower value; determine a parameter that is indicative of a time period of the variation of the signal; and determine a capacitance of the MEMS capacitive transducer based on the parameter that is indicative of the time period.

Abstract: The disclosure provides a system, comprising: a MEMS capacitive transducer, comprising one or more first capacitive plates coupled to a first node and one or more second capacitive plates coupled to a second node; biasing circuitry coupled to the first node, operable to provide a biasing voltage to the one or more first capacitive plates; and test circuitry coupled to the second node, operable to: selectively apply one or more current sources to the second node, so as to charge and discharge the MEMS capacitive transducer and so vary a signal based on a voltage at said second node between an upper value and a lower value; determine a parameter that is indicative of a time period of the variation of the signal; and determine a capacitance of the MEMS capacitive transducer based on the parameter that is indicative of the time period.

Abstract: The disclosure provides a system, comprising: a MEMS capacitive transducer, comprising one or more first capacitive plates coupled to a first node and one or more second capacitive plates coupled to a second node; biasing circuitry coupled to the first node, operable to provide a biasing voltage to the one or more first capacitive plates; and test circuitry coupled to the second node, operable to: selectively apply one or more current sources to the second node, so as to charge and discharge the MEMS capacitive transducer and so vary a signal based on a voltage at said second node between an upper value and a lower value; determine a parameter that is indicative of a time period of the variation of the signal; and determine a capacitance of the MEMS capacitive transducer based on the parameter that is indicative of the time period.

Abstract: The disclosure provides a system, comprising: a MEMS capacitive transducer, comprising one or more first capacitive plates coupled to a first node and one or more second capacitive plates coupled to a second node; biasing circuitry coupled to the first node, operable to provide a biasing voltage to the one or more first capacitive plates; and test circuitry coupled to the second node, operable to: selectively apply one or more current sources to the second node, so as to charge and discharge the MEMS capacitive transducer and so vary a signal based on a voltage at said second node between an upper value and a lower value; determine a parameter that is indicative of a time period of the variation of the signal; and determine a capacitance of the MEMS capacitive transducer based on the parameter that is indicative of the time period.

Abstract: Circuitry for biasing a MEMS transducer and associated signal processing circuitry. A reference voltage generator is configured to generate a reference voltage at a reference voltage node. Control circuitry generates a drive signal to control a first current source which is operable to supply a current to the reference voltage generator in response to the drive signal. A switched DC-DC converter, such as a charge pump has a voltage input connected to the reference voltage node and a voltage output for providing a bias voltage for the MEMS transducer. The DC-DC converter cyclically switches in a sequence of states including at least a first state where a first converter capacitance is disconnected from the voltage input followed by a second state where the first converter capacitance is connected to the voltage input. A second current source is operable to supply a bias current in response to a voltage at a bias control node.

Abstract: This application relates to methods and apparatus for relates to methods and apparatus for operating digital microphones, and in particular to biasing of digital microphones. The application discloses a circuit (402) for providing a bias current (Ibias) for a digital microphone (401). A first current generator (403) is configured to receive a clock signal (CLK) supplied to the digital microphone and generate a first current based on the clock signal. The first current generator is configured to generate the first current over at least one operating band of frequencies of the clock signal such that the first current varies with the frequency of the clock signal over substantially the whole of said operating band of frequencies. The bias current is based on said first current and in some embodiments the first current may be provided as the bias current.

Abstract: Amplifier arrangements for read-out of MEMS capacitive transducers, such as low-noise amplifiers. An amplifier circuit has first and second MOS transistors, with the gate of the first transistor driven by the input signal, and the gate of the second transistor driven by a reference. The sources of the first and second transistors are connected via an impedance. Modulation circuitry is arranged to monitor a signal with a value that varies with the input signal and to modulate the back-bias voltage between the bulk and source terminals of the first and second transistors with the applied modulation being equal for each transistor and based on said monitored signal. The back-bias of the first transistor can be increase to extend the input range of the transistor in situations where the input signal may otherwise result in signal clipping, while avoiding noise and power issues for other input signal levels.

Abstract: Circuitry for biasing a MEMS transducer and associated signal processing circuitry. A reference voltage generator is configured to generate a reference voltage at a reference voltage node. Control circuitry generates a drive signal to control a first current source which is operable to supply a current to the reference voltage generator in response to the drive signal. A switched DC-DC converter, such as a charge pump has a voltage input connected to the reference voltage node and a voltage output for providing a bias voltage for the MEMS transducer. The DC-DC converter cyclically switches in a sequence of states including at least a first state where a first converter capacitance is disconnected from the voltage input followed by a second state where the first converter capacitance is connected to the voltage input. A second current source Is operable to supply a bias current in response to a voltage at a bias control node.

Abstract: Amplifier arrangements for read-out of MEMS capacitive transducers, such as low-noise amplifiers. An amplifier circuit has first and second MOS transistors, with the gate of the first transistor driven by the input signal, and the gate of the second transistor driven by a reference. The sources of the first and second transistors are connected via an impedance. Modulation circuitry is arranged to monitor a signal with a value that varies with the input signal and to modulate the back-bias voltage between the bulk and source terminals of the first and second transistors with the applied modulation being equal for each transistor and based on said monitored signal. The back-bias of the first transistor can be increase to extend the input range of the transistor in situations where the input signal may otherwise result in signal clipping, while avoiding noise and power issues for other input signal levels.