Abstract: The invention is based on a method for coating at least one wiper blade element (10) made of an elastomer material, in which first, the surface of the wiper blade element (10) is cleaned and activated by means of a plasma, and then in a CVD process, a coating material is brought into a plasma state and at least one protective coating (64) forms on the surface of the wiper blade element (10), where a high-frequency voltage is applied to the region of the wiper blade element (10) oriented away from the protective layer (64) by means of an electrode (56). The invention proposes that before being brought into a treatment chamber (32, 34, 36, 38, 40, 74), the wiper blade element (10) be cut to a useful length (66) from a profiled band and placed on an electrode plate (56) so that its wiper lip (18) stands approximately perpendicular to the electrode plate (56), which extends to both sides of the wiper blade element (10), and is subjected to a plasma flow (50).

Abstract: In a method of coating workpieces in a vacuum chamber, a workpiece is exposed to a plasma, and the resulting reaction products or decomposition products of the process gas are deposited on the workpiece. This method is characterized in that two poles, one of which is the workpiece itself or an electrode situated directly behind the workpiece and the other is a counter-electrode, are acted upon by an alternating voltage in the frequency range of 10 kHz to 100 MHz to produce the plasma between the poles, and a stream of process gas is directed onto the workpiece through an orifice in the counter-electrode.

Abstract: A rotary drive which is suitable in treatment of three-dimensional workpieces. In this rotary apparatus, only the removably mounted rotatable rods that serve as sample holders are connected to high voltage, which is delivered via a central high-voltage lead-in at the lower end of the rods, while the actual drive elements for rotating the rods are electrically insulated therefrom by suitable ceramic insulating elements.

Abstract: The invention is based on a method for coating at least one wiper blade element (10) made of an elastomer material, in which first, the surface of the wiper blade element (10) is cleaned and activated by means of a plasma, and then in a CVD process, a coating material is brought into a plasma state and at least one protective coating (64) forms on the surface of the wiper blade element (10), where a high-frequency voltage is applied to the region of the wiper blade element (10) oriented away from the protective layer (64) by means of an electrode (56).

Abstract: A combination wear protection film for components made of substrates susceptible to wear is described. The film has a wear-resistant surface film that contains one or more of the elements carbon, nitrogen, or boron, the proportion of this element—or, if more than one of these elements is present, the sum of the proportions of the elements present—is at least 30% by atomic weight, preferably at least 40% by atomic weight; and a support film, located between a substrate and the surface film and made of a plasma polymer, that exhibits a quasi-continuous transition in modulus of elasticity and optionally in hardness from a value of a base film to a value of the surface film. A method for producing a wear protection film of this kind, and objects equipped with the wear protection film is also described.

Abstract: The invention concerns a rotary drive that is suitable in particular for performing a plasma immersion-assisted treatment of three-dimensional workpieces. In this rotary apparatus (10), only the removably mounted rotatable rods (1, 11) that serve as sample holders are connected to high voltage, which is delivered via a central high-voltage lead-in (9) at the lower end of the rods, while the actual drive elements (7, 17) for rotating the rods (1, 11) are electrically insulated therefrom by suitable ceramic insulating elements (2, 3, 12, 13) FIG. 1.

Abstract: In the process for coating the elastomeric rubber wiper a vaporous coating material is generated and activated by a plasma and/or laser; a protective coating is formed on a rubber wiper surface by exposing it to the vaporous coating material by CVD and/or PVD methods and process parameters for the coating process are controlled so that the protective coating includes at least three coating layers and has a total thickness of from 200 nm to 2 &mgr;m. The coating layers include at least one thicker softer elastic coating layer with elastomeric properties similar to those of the rubber wiper and other thinner harder coating layers having wear-resistant properties. The other thinner harder coating layers have respective hardness increasing from an inner most one to an outermost one of the other thinner harder coating layers.