Patents by Inventor Jeevan SHANBHAG

Jeevan SHANBHAG has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11074426
    Abstract: The present disclosure relates to systems and methods for semiconductor tool part tracking and kit verification. Data relating to part identification and performance are encoded to a unique code that is encoded into machine-readable form, such as a data matrix. A multi-dimensional array (MDA) of the data matrices of a group of parts is a ‘golden MDA’. When assembled into a kit, the parts are scanned and compared to the golden MDA. If there's a match, a kit unique code is used to generate a kit data matrix. The part data matrix codes are provided to a database to determine if a part combination will cause a coupling effect, based on part usage history.
    Type: Grant
    Filed: May 29, 2020
    Date of Patent: July 27, 2021
    Assignee: Applied Materials, Inc.
    Inventors: Chien-Min Liao, Yao-Hung Yang, Hsiu Yang, Jeevan Shanbhag, Chun-Chung Chen, Tom K. Cho
  • Publication number: 20210168979
    Abstract: The present disclosure is directed to a system and method to identify and track parts of a semiconductor processing chamber, as well as the status of the parts, and store status information in a centralized location as status changes over time.
    Type: Application
    Filed: December 3, 2019
    Publication date: June 3, 2021
    Inventors: Hsui YANG, Yao-Hung YANG, Jeevan SHANBHAG, Chien-Min LIAO, Earl HUNTER, David GANON, Mariana LUIGI, Siamak SALIMIAN, Tom K. CHO, Chun-Chung CHEN