Patents by Inventor JEFF CUNHA

JEFF CUNHA has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • METHOD FOR REPAIRING HEATERS AND CHUCKS USED IN SEMICONDUCTOR PROCESSING
    Publication number: 20190366459
    Abstract: A method for the repair of a heater, or an electrostatic chuck, using a ceramic top layer joined with a hermetically sealed joint. The heater or electrostatic chuck may be machined down to remove a damaged top surface, and to allow for the joining of a new top surface. The new top pieces may be aluminum nitride and the pieces may be brazed with an aluminum alloy under controlled atmosphere. The joint material is adapted to later withstand both the environments within a process chamber during substrate processing, and the oxygenated atmosphere which may be seen within the shaft of a heater or electrostatic chuck.
    Type: Application
    Filed: May 18, 2018
    Publication date: December 5, 2019
    Inventors: BRENT ELLIOT, FRANK BALMA, ALEXANDER VEYTSER, MICHAEL PARKER, JEFF CUNHA
  • Method for repairing heaters and chucks used in semiconductor processing
    Patent number: 9999947
    Abstract: A method for the repair of a heater, or an electrostatic chuck, using a ceramic top layer joined with a hermetically sealed joint. The heater or electrostatic chuck may be machined down to remove a damaged top surface, and to allow for the joining of a new top surface. The new top pieces may be aluminum nitride and the pieces may be brazed with an aluminum alloy under controlled atmosphere. The joint material is adapted to later withstand both the environments within a process chamber during substrate processing, and the oxygenated atmosphere which may be seen within the shaft of a heater or electrostatic chuck.
    Type: Grant
    Filed: April 20, 2016
    Date of Patent: June 19, 2018
    Assignee: Component Re-Engineering Company, Inc.
    Inventors: Brent Elliot, Frank Balma, Alexander Veytser, Michael Parker, Jeff Cunha
  • METHOD FOR REPAIRING HEATERS AND CHUCKS USED IN SEMICONDUCTOR PROCESSING
    Publication number: 20170072516
    Abstract: A method for the repair of a heater, or an electrostatic chuck, using a ceramic top layer joined with a hermetically sealed joint. The heater or electrostatic chuck may be machined down to remove a damaged top surface, and to allow for the joining of a new top surface. The new top pieces may be aluminum nitride and the pieces may be brazed with an aluminum alloy under controlled atmosphere. The joint material is adapted to later withstand both the environments within a process chamber during substrate processing, and the oxygenated atmosphere which may be seen within the shaft of a heater or electrostatic chuck.
    Type: Application
    Filed: April 20, 2016
    Publication date: March 16, 2017
    Inventors: BRENT ELLIOT, FRANK BALMA, ALEXANDER VEYTSER, MICHAEL PARKER, JEFF CUNHA