Patents by Inventor Jeff D. Achenbach

Jeff D. Achenbach has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for etching tungsten
    Patent number: 4997520
    Abstract: A method for etching a tungsten film which includes introducing activated species of a halogenated hydrocarbon to the tungsten film.
    Type: Grant
    Filed: June 10, 1988
    Date of Patent: March 5, 1991
    Assignee: Texas Instruments Incorporated
    Inventors: Rhett B. Jucha, Cecil J. Davis, Duane Carter, Jeff D. Achenbach
  • Method for etching semiconductor materials using a remote plasma generator
    Patent number: 4988644
    Abstract: An apparatus and a method for the etching of semiconductor materials is disclosed. The apparatus includes a process chamber which includes a plasma generator remote from and in fluid communication with the process chamber. The remote plasma generator includes an inlet tube, a discharge tube in fluid communication with the inlet tube, an excitation cavity surrounding the discharge tube, an outlet tube in fluid communication with the discharge tube and a process chamber, and an injection tube in the outlet tube.
    Type: Grant
    Filed: May 23, 1989
    Date of Patent: January 29, 1991
    Assignee: Texas Instruments Incorporated
    Inventors: Rhett B. Jucha, Cecil J. Davis, Steve S. Huang, Lee M. Loewenstein, Jeff D. Achenbach