Patents by Inventor Jeff F. Olson

Jeff F. Olson has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Rinsing processes and equipment
    Patent number: 7364625
    Abstract: Described are methods of rinsing and processing devices such as semiconductor wafers wherein the device is rinsed with using a surface tension reducing agent; the method may include a subsequent drying step which preferably incorporates the use of a surface tension reducing agent during at least partial drying; and the method may be performed using automated rinsing equipment; also described are automated rinsing apparatuses useful with the method.
    Type: Grant
    Filed: May 20, 2002
    Date of Patent: April 29, 2008
    Assignee: FSI International, Inc.
    Inventors: Kurt K. Christenson, Steven L. Nelson, James R. Oikari, Jeff F. Olson, Biao Wu
  • Rinsing processes and equipment
    Publication number: 20020170573
    Abstract: Described are methods of rinsing and processing devices such as semiconductor wafers wherein the device is rinsed with using a surface tension reducing agent; the method may include a subsequent drying step which preferably incorporates the use of a surface tension reducing agent during at least partial drying; and the method may be performed using automated rinsing equipment; also described are automated rinsing apparatuses useful with the method.
    Type: Application
    Filed: May 20, 2002
    Publication date: November 21, 2002
    Inventors: Kurt K. Christenson, Steven L. Nelson, James R. Oikari, Jeff F. Olson, Biao Wu