Patents by Inventor JEFF FARBER

JEFF FARBER has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • HIGH RPM MEGASONIC CLEANING
    Publication number: 20010047810
    Abstract: A method that involves spraying a liquid agitated with a sonic wave at a megasonic frequency onto a substrate from a nozzle positioned over the substrate. Simultaneously, the substrate is spun above 300 RPM while the nozzle is swept over the substrate. The substrate may be brushed in a brush station before agitating the liquid with the sonic wave. An apparatus having an arm in fluid communication with a nozzle that has an angular position &thgr; greater than 0°. Also, there is a substrate spinner positioned below the nozzle.
    Type: Application
    Filed: June 29, 1999
    Publication date: December 6, 2001
    Inventors: JEFF FARBER, ALLAN M. RADMAN, JULIA SVIRCHEVSKI, HELMUTH TREICHEL