Patents by Inventor Jeff Navarro

Jeff Navarro has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Substrate processing apparatus with composite seal
    Patent number: 8623145
    Abstract: A seal for sealing an interface between a container and a lid of a process chamber. The seal comprises a first seal element and a second seal element that are arranged to seal the interface in series, with the second seal element being situated to encounter processing activity upstream of the fist seal element. The first seal element has a deflectable portion and a protrusion extending radially from the deflectable portion. The second seal element has a radially extending recess in which the protrusion of the first seal element is received. The protrusion and recess interlock to restrict separation and/or rotation of the first and second seal elements. Inclined surfaces of the first seal element interact with the second seal element to apply axial sealing forces to sealing surfaces of the second seal member.
    Type: Grant
    Filed: March 25, 2010
    Date of Patent: January 7, 2014
    Assignee: Parker-Hannifin Corporation
    Inventors: Don Bowman, Stephen Coppola, Kenneth W. Cornett, Dan Funke, Julian Kamibayashiyama, Jeff Navarro, Jeremy M. Payne, Donald J. Peterson, Douglas C. Schenk
  • SUBSTRATE PROCESSING APPARATUS WITH COMPOSITE SEAL
    Publication number: 20110232843
    Abstract: A seal for sealing an interface between a container and a lid of a process chamber. The seal comprises a first seal element and a second seal element that are arranged to seal the interface in series, with the second seal element being situated to encounter processing activity upstream of the fist seal element. The first seal element has a deflectable portion and a protrusion extending radially from the deflectable portion. The second seal element has a radially extending recess in which the protrusion of the first seal element is received. The protrusion and recess interlock to restrict separation and/or rotation of the first and second seal elements. Inclined surfaces of the first seal element interact with the second seal element to apply axial sealing forces to sealing surfaces of the second seal member.
    Type: Application
    Filed: March 25, 2010
    Publication date: September 29, 2011
    Inventors: Don Bowman, Stephen Coppola, Kenneth W. Cornett, Dan Funke, Julian Kamibayashiyama, Jeff Navarro, Jeremy M. Payne, Donald J. Peterson, Douglas C. Schenk