Patents by Inventor Jeff Rudd

Jeff Rudd has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Slurry flow rate monitoring in chemical-mechanical polisher using pressure transducer
    Publication number: 20030166378
    Abstract: In a first aspect of the invention, a polishing device is provided. The polishing device includes a platen adapted to support a polishing pad and also includes a source of polishing slurry. Also included in the polishing device is a slurry supply line adapted to supply the polishing slurry from the source of polishing slurry to the polishing pad. The polishing device includes a pressure transducer installed along the slurry supply line and adapted to detect a pressure inside the slurry supply line. Numerous other aspects are provided.
    Type: Application
    Filed: February 7, 2003
    Publication date: September 4, 2003
    Inventors: Boris Fuksshimov, Jeff Rudd, Charles C. Garretson, Brian J. Brown