Patents by Inventor Jeff WuYu SU

Jeff WuYu SU has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20180364028
    Abstract: A device for measuring heights and/or thicknesses on a measurement object, includes (i) a first low-coherence interferometer for combining, in one spectrometer, a reference optical beam and a measurement optical beam originating from reflections of the light on interfaces of the measurement object, to produce a grooved spectrum signal with spectral modulation frequencies, (ii) apparatus for measuring an item of position information representative of the relative optical length, (iii) electronic and calculating apparatus arranged for determining at least one spectral modulation frequency representative of an optical path difference between the measurement optical beam and the reference optical beam, and for determining, by exploiting the item of information and the spectral modulation frequency, at least one height and/or thickness on the measurement object, and (iv) second optical apparatus for measuring distance and/or thickness with a second measurement beam incident on the measurement object on a second fa
    Type: Application
    Filed: December 7, 2016
    Publication date: December 20, 2018
    Inventors: Jean-Philippe PIEL, Jeff WuYu SU, BenoƮt THOUY