Patents by Inventor Jeffery C. Hudgens

Jeffery C. Hudgens has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Sealed substrate carriers and systems and methods for transporting substrates
    Patent number: 11990358
    Abstract: A semiconductor processing system includes a first component forming a first chamber. A first sealed environment in the first chamber is at a first state prior to a door being opened. A load port structure is disposed between the first component and a second component. The load port structure includes walls disposed around an opening of the load port structure. The load port structure is separate from the first component and the second component. A third component is configured to change at least one of the first state of the first sealed environment within the first chamber or a second state of a second sealed environment within a second chamber formed by the second component to cause the first state and the second state to be substantially similar before the door between the first sealed environment and the second sealed environment is opened.
    Type: Grant
    Filed: April 3, 2023
    Date of Patent: May 21, 2024
    Assignee: Applied Materials, Inc.
    Inventors: Michael Robert Rice, Jeffery C. Hudgens
  • SEALED SUBSTRATE CARRIERS AND SYSTEMS AND METHODS FOR TRANSPORTING SUBSTRATES
    Publication number: 20230253228
    Abstract: A semiconductor processing system includes a first component forming a first chamber. A first sealed environment in the first chamber is at a first state prior to a door being opened. A load port structure is disposed between the first component and a second component. The load port structure includes walls disposed around an opening of the load port structure. The load port structure is separate from the first component and the second component. A third component is configured to change at least one of the first state of the first sealed environment within the first chamber or a second state of a second sealed environment within a second chamber formed by the second component to cause the first state and the second state to be substantially similar before the door between the first sealed environment and the second sealed environment is opened.
    Type: Application
    Filed: April 3, 2023
    Publication date: August 10, 2023
    Inventors: Michael Robert Rice, Jeffery C. Hudgens