Patents by Inventor Jeffery Marks

Jeffery Marks has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • APPARATUS AND METHODS FOR OPTIMIZING CLEANING OF PATTERNED SUBSTRATES
    Publication number: 20090101166
    Abstract: Methods and apparatus for cleaning wafer surfaces are provided, especially for cleaning surfaces of patterned wafers. The cleaning apparatus includes a cleaning head with channels on the surface facing the patterned wafers which has a predominant pattern. Cleaning material flowing the channels exerts a shear force on the surface of a patterned wafer, which is oriented in a specific direction to the cleaning head. The shear force and the specific orientation between the patterned wafer and the cleaning head improve the removal efficiency of the surface contaminants.
    Type: Application
    Filed: October 14, 2008
    Publication date: April 23, 2009
    Applicant: LAM RESEARCH CORPORATION
    Inventors: John M. de Larios, Erik M. Freer, Michael Ravkin, Jeffery Marks