Patents by Inventor Jeffery Ronald CAMPBELL

Jeffery Ronald CAMPBELL has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • INDEPENDENT RADIANT GAS PREHEATING FOR PRECURSOR DISASSOCIATION CONTROL AND GAS REACTION KINETICS IN LOW TEMPERATURE CVD SYSTEMS
    Publication number: 20170362702
    Abstract: In one embodiment, a gas distribution assembly includes an injection block having at least one inlet to deliver a precursor gas to a plurality of plenums from at least two gas sources, a perforated plate bounding at least one side of each of the plurality of plenums, at least one radiant energy source positioned within each of the plurality of plenums to provide energy to the precursor gas from one or both of the at least two gas sources and flow an energized gas though openings in the perforated plate and into a chamber, and a variable power source coupled to each of the radiant energy sources positioned within each of the plurality of plenums.
    Type: Application
    Filed: March 3, 2014
    Publication date: December 21, 2017
    Applicant: Applied Materials, Inc.
    Inventors: David Keith CARLSON, Satheesh KUPPURAO, Howard BECKFORD, Herman DINIZ, Kailash Kiran PATALAY, Brian Hayes BURROWS, Jeffery Ronald CAMPBELL, Zuoming ZHU, Xiaowei LI, Errol Antonio SANCHEZ
  • INDEPENDENT RADIANT GAS PREHEATING FOR PRECURSOR DISASSOCIATION CONTROL AND GAS REACTION KINETICS IN LOW TEMPERATURE CVD SYSTEMS
    Publication number: 20140175054
    Abstract: In one embodiment, a gas distribution assembly includes an injection block having at least one inlet to deliver a precursor gas to a plurality of plenums from at least two gas sources, a perforated plate bounding at least one side of each of the plurality of plenums, at least one radiant energy source positioned within each of the plurality of plenums to provide energy to the precursor gas from one or both of the at least two gas sources and flow an energized gas though openings in the perforated plate and into a chamber, and a variable power source coupled to each of the radiant energy sources positioned within each of the plurality of plenums.
    Type: Application
    Filed: March 3, 2014
    Publication date: June 26, 2014
    Applicant: Applied Materials, Inc.
    Inventors: David Keith CARLSON, Satheesh KUPPURAO, Howard BECKFORD, Herman DINIZ, Kailash Kiran PATALAY, Brian Hayes BURROWS, Jeffery Ronald CAMPBELL, Zuoming ZHU, Xiaowei LI, Errol Antonio SANCHEZ