Patents by Inventor Jeffery Tobin

Jeffery Tobin has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Gas coupler for substrate processing chamber
    Patent number: 8216374
    Abstract: A gas coupler is capable of conducting gas between a gas component, gas source and substrate processing chamber. The gas coupler comprises a metal block comprising a gas component seating surface having a plurality of gas component coupling ports. The block also has a plurality of sidewalls at right angles to the gas component seating surface, each sidewall comprising a counterbored gas orifice. A plurality of right-angled internal passageways are each connected to a gas component coupling port. Each internal passageway terminates at counterbored gas orifice on a different sidewall surface so that each gas component coupling port is fluidly connected to a different sidewall.
    Type: Grant
    Filed: December 20, 2006
    Date of Patent: July 10, 2012
    Assignee: Applied Materials, Inc.
    Inventors: Joel Huston, Jeffery Tobin, Christophe Marcadal
  • GAS COUPLER FOR SUBSTRATE PROCESSING CHAMBER
    Publication number: 20070144436
    Abstract: A gas coupler is capable of conducting gas between a gas component, gas source and substrate processing chamber. The gas coupler comprises a metal block comprising a gas component seating surface having a plurality of gas component coupling ports. The block also has a plurality of sidewalls at right angles to the gas component seating surface, each sidewall comprising a counterbored gas orifice. A plurality of right-angled internal passageways are each connected to a gas component coupling port. Each internal passageway terminates at counterbored gas orifice on a different sidewall surface so that each gas component coupling port is fluidly connected to a different sidewall.
    Type: Application
    Filed: December 20, 2006
    Publication date: June 28, 2007
    Inventors: Joel Huston, Jeffery Tobin, Christophe Marcadal