Abstract: A smart mobile device charger comprises a communication unit configured to communicate with at least one first device. The communication unit is further configured to receive a first charge authorization signal from a mobile application associated with each of the at least one first device. A charging unit is coupled to the communication unit the and the charging unit is configured to charge at least one first mobile device based at least in part on the first charge authorization signal. Also disclosed are a method and system of smart charging mobile devices.

Abstract: An exhaust system for use with a high temperature furnace used to perform oxidation and/or annealing operations of the type used in semiconductor fabrication. The exhaust system is designed to permit the furnace to be used with a controlled environment chamber surrounding the entry to the process chamber of the furnace. The exhaust system allows a relatively high velocity flow of exhaust gas from the process chamber through the exhaust system to occur when a positive pressure (e.g., annealing) operations are performed. Such high velocity flow prevents (a) backstreaming and (b) the accumulation of non-uniform concentrations of exhaust gases in the exhaust system, thereby permitting the accurate monitoring of the concentration of a selected gas in the exhaust system. Based on such monitoring, the opening of the door to the process chamber of the furnace may be prevented when the concentration of the selected gas exceeds a predetermined level.