Patents by Inventor Jeffrey Allen BRODINE

Jeffrey Allen BRODINE has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Processing system for forming layers
    Patent number: 11414740
    Abstract: Embodiments of the present disclosure generally relate to a processing system for forming one or more layers of a photodiode. In one embodiment, the processing system includes a transfer chamber, a plurality of processing chambers, and a controller configured to cause a process to be performed in the processing system. The process includes performing a pre-clean process on a substrate, aligning and placing a first mask on the substrate, depositing a first layer on the substrate, and depositing a second layer on the substrate. The processing system can form layers of a photodiode in a low defect, cost effective, and high utilization manner.
    Type: Grant
    Filed: May 1, 2020
    Date of Patent: August 16, 2022
    Assignee: Applied Materials, Inc.
    Inventors: Alexander N. Lerner, Roey Shaviv, Michael P. Karazim, Kevin Vincent Moraes, Steven V. Sansoni, Andrew J. Constant, Jeffrey Allen Brodine, Kim Ramkumar Vellore, Amikam Sade, Niranjan Kumar
  • PROCESSING SYSTEM FOR FORMING LAYERS
    Publication number: 20200385851
    Abstract: Embodiments of the present disclosure generally relate to a processing system for forming one or more layers of a photodiode. In one embodiment, the processing system includes a transfer chamber, a plurality of processing chambers, and a controller configured to cause a process to be performed in the processing system. The process includes performing a pre-clean process on a substrate, aligning and placing a first mask on the substrate, depositing a first layer on the substrate, and depositing a second layer on the substrate. The processing system can form layers of a photodiode in a low defect, cost effective, and high utilization manner.
    Type: Application
    Filed: May 1, 2020
    Publication date: December 10, 2020
    Inventors: Alexander N. LERNER, Roey SHAVIV, Michael P. KARAZIM, Kevin Vincent MORAES, Steven V. SANSONI, Andrew J. CONSTANT, Jeffrey Allen BRODINE, Kim Ramkumar VELLORE, Amikam SADE, Niranjan KUMAR