Patents by Inventor Jeffrey D. Rose

Jeffrey D. Rose has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Process for forming a semiconductor device and a process for operating an apparatus
    Patent number: 6245686
    Abstract: A process for forming a semiconductor device includes placing a substrate (104) into an apparatus (300), creating a plasma, and processing the substrate (104). The apparatus (300) includes an electromagnetic source (120), a bulk material (302), and a first barrier layer (304). The bulk material (302) is between the electromagnetic source (120) and an interior (126) of the apparatus (300). The first barrier layer (304) is between the bulk material (302) and the interior (126). A process for operating an apparatus (300) includes forming a polymer layer along an inorganic layer (302, 306or 702), wherein the polymer layer is formed within the apparatus (300); removing the polymer layer to expose the inorganic layer (302, 306, or 702); and etching at least a portion of the exposed inorganic layer (302, 306, or 702). Typically, the inorganic layer (203, 306, or 702) is semiconductive or resistive.
    Type: Grant
    Filed: June 5, 2000
    Date of Patent: June 12, 2001
    Assignee: Motorola Inc.
    Inventors: Jeffrey D. Rose, Michael J. Hartig, David G. Farber, Danny R. Babbitt, Jason A. Rivers, Ai Koh, Terry G. Sparks