Patents by Inventor Jeffrey E. Fletcher

Jeffrey E. Fletcher has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Wafer processing apparatus having a chamber with an upper wall having gas supply openings formed therein which promote more even processing of a wafer
    Publication number: 20020144784
    Abstract: The invention relates to wafer processing apparatus having a chamber with an upper wall with gas supply openings formed therein which promote more even processing of a wafer. According to one embodiment of the invention, the openings are formed so as to create a circular flow path in the chamber. Another embodiment of the invention provides for the formation of the openings to create turbulent flow. A further embodiment of the invention provides for a nonuniform distribution of the openings so as to counteract a tendency for a flow over a wafer in one area to be higher than in another area.
    Type: Application
    Filed: April 6, 2001
    Publication date: October 10, 2002
    Inventors: Don E. Curry, Jeffrey E. Fletcher