Abstract: A camera may capture reflected light from the surface of the wafer during a semiconductor process that adds or removes material from the wafer, such as an etch process. To accurately determine an endpoint for the process, a camera sampling rate and light source intensity may be optimized in the process recipe. Optimizing the light source intensity may include characterizing light intensities that will be reflected from the waiver using an image of the wafer. Pixel intensities may be used to adjust the light source intensity to compensate for more complex wafer patterns. Optimizing the camera sampling rates may include nondestructively rotating a view of the wafer and converting the sampled intensities to the frequency domain. The camera sampling rate may be increased or decreased to remove spatial noise from the image without oversampling unnecessarily. These optimized parameters may then generate a clean, repeatable trace for endpoint determination.

Abstract: The end fitting of the present invention is generally hollowly cylindrical in shape and sized so that the outer diameter of the end fitting is slightly larger than the outer diameter of the well screen to which the fitting is to be joined. Bores are formed in the body of the end fitting. The number and placement of bores in the end fitting should be such that the number and placement of bores in the end fitting match the number and placement of longitudinal rods in the well screen. The end fitting is mounted to the well screen by means of inserting each of the longitudinal rods of the well screen into each of the bores in the end fitting. The end fitting is permanently secured to the well screen by swaging the end fitting so that the fitting is compressed about the longitudinal rods. Alternatively, adhesive may be used to secure the longitudinal rods in the bores of the end fitting. In an alternative embodiment of the invention, the bores are drilled completely through the end fitting.

Abstract: The lubricating oil removal device and method of the present invention provides a device for intercepting the oil used to lubricate the line shaft bearings of an oil lubricated turbine pump before the oil can contaminate the water. Holes are provided in the oil tube below the bottom bearing to be lubricated and above the relief ports typically provided in the bowl assembly. An annular relief collar is provided around the oil tube at the location of the holes. A drainage pipe allows oil to flow from the relief collar to a reservoir located on the outside of the column pipe. A pump located within the reservoir lifts oil from the reservoir, through a tube, and onto the surface for reuse or disposal.

Abstract: A device and method for detecting bearing overheating in oil-lubricated turbine pumps comprising and temperature transmitting collar and infrared sensor. The temperature transmitting collar is mounted on the pump line shaft immediately adjacent to the stretch bearing, which is the top bearing in the pump system. The infrared sensor is positioned within sensing distance of the temperature transmitting collar and control circuitry is provided to warn of abnormal temperatures and to turn the pump off if temperatures continue to rise to an alarm condition.