Patents by Inventor Jeffrey Gacutan

Jeffrey Gacutan has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of and apparatus for supply and recovery of target material
    Patent number: 9699876
    Abstract: An EUV light source target material handling system is disclosed which may comprise a droplet generator having a target material reservoir in which the target material may be replenished while a nozzle portion of the droplet generator is maintained at temperature. Also disclosed is a system for selectively draining spent target material.
    Type: Grant
    Filed: January 9, 2014
    Date of Patent: July 4, 2017
    Assignee: ASML NETHERLANDS, B.V.
    Inventors: Georgiy Vaschenko, Peter Baumgart, Jeffrey Gacutan, Martin Algots, Theodosios Syrpis, Chirag Rajyaguru, Sanjeev Seshagiri
  • METHOD OF AND APPARATUS FOR SUPPLY AND RECOVERY OF TARGET MATERIAL
    Publication number: 20140261761
    Abstract: An EUV light source target material handling system is disclosed which may comprise a droplet generator having a target material reservoir in which the target material may be replenished while a nozzle portion of the droplet generator is maintained at temperature. Also disclosed is a system for selectively draining spent target material.
    Type: Application
    Filed: January 9, 2014
    Publication date: September 18, 2014
    Inventors: Georgiy VASCHENKO, Peter Baumgart, Jeffrey Gacutan, martin Algots, Theodosios Syrpis, Chirag Rajyaguru, Sanjeev Seshagiri