Abstract: The invention is directed to a method and system for pod transportation within a semiconductor fabrication facility. The invention comprises a material control system that determines a pod that a station will require next and then sends an instruction to a vehicle to receive the pod that the station currently has and deliver the pod that the station will require next. The invention reduces cycle time by minimizing transportation moves of vehicles within the semiconductor fabrication facility.

Abstract: The invention is directed to an improved apparatus and method for transportation of a pod in a semiconductor fabrication facility. The invention comprises a lead vehicle with a communication system and control system and a trailer with a mechanism for delivering and receiving pods from stations in the facility. The trailer is connected to the lead vehicle and has a compartment for the transportation of a pod, but comprises fewer components than the lead vehicle. Therefore, the invention is manufactured at reduced cost, but with double pod transportation capacity.

Abstract: Methods, systems and apparatus for swapping pods within a semiconductor processing tool during a substrate processing cycle. A dirty pod carrying a substrate in need of processing is provided within the processing tool, and the substrate is transferred into a processing chamber thereof. At least one clean pod is also provided within the processing tool. Upon substrate processing completion, the processed substrate is transferred from the chamber directly into a clean pod within the processing tool. Wherein a plurality of substrates are processed within the chamber, a plurality of clean pods may be provided within the tool whereby the plurality of substrates are transferred into a single clean pod or split into subsets that are transferred into different clean pods within the processing tool. The clean pod(s) carrying the processed substrate(s) are then transferred to other tool(s) for continued semiconductor fabrication processing.

Abstract: A clean room covering or enclosure for a portable computer, wherein the computer has a keyboard portion and a screen portion connected by a hinge foldable between closed and open positions. The enclosure comprises a flexible sleeve for receiving the keyboard portion of the portable computer, with the sleeve having an opening through which the keyboard portion is inserted and removed, a transparent portion for viewing and operating the keyboard and a gas permeable vent portion adapted to restrict flow of contaminant particles. A flexible flap extends from the sleeve portion and is adapted to wrap around and over the screen portion of the portable computer, and has a transparent portion for viewing the screen. The enclosure also includes a reclosable seal for securing the flexible flap around the screen portion. The reclosable seal preferably secures the flexible sleeve opening to restrict flow of contaminant particles.

Abstract: Communication between a controller and a set of automated vehicles in a manufacturing facility is improved by use of a closed-loop control system that operates on a real-time interrupt basis in which autonomous carriers report their location, sensed from reference markers along a track, the reference markers being referenced to an absolute grid in space, to a central controller or to one of a set of zone controllers that monitor the location of nearby vehicles that ordinarily use a token-passing system to avoid collisions, but which controllers can intervene to prevent one vehicle from blocking or interfering with another.

Abstract: Exemplary embodiments of the invention include a method, system, and storage medium for facilitating a transport scheme in an automated material handling system environment. The method includes detecting an occurrence of a trigger event while monitoring production operations in an automated material handling system environment, identifying a materials candidate to purge from a production line in response to the trigger event, production data captured relating to the materials candidate, and user-defined criteria for purging materials from the production line. The method also includes selecting a disposition plan for handling the materials candidate, generating a transport process job for the materials candidate for instructing the automated material handling system on executing the disposition plan, and transmitting the transport process job to the automated material handling system for execution.