Abstract: A microsystem includes a base layer formed from an electrical insulating material. The base layer has an inner surface defining a cavity and an external surface opposed to the inner surface, and in direct communication with an environment. A cap layer and a microelectromechanical (MEMS) device layer are formed from electrical insulating material or an other electrical insulating material. The cap has an inner surface defining a cavity, and an external surface opposed to the inner surface, and in direct communication with the environment. A MEMS device on/in the MEMS device layer is disposed between the base and the cap. Respective adjacent portions of the base, the cap and the device substrate are bonded to define an enclosed space. The enclosed space at least partially includes the base cavity or the cap cavity. At least a portion of a MEMS device on the device layer is in the enclosed space.

Abstract: One or more conductive shielding plates are formed in a standard ASIC wafer top metal layer, e.g., for blocking cross-talk from MEMS device structure(s) on the MEMS wafer to circuitry on the ASIC wafer when the MEMS device is capped directly by the ASIC wafer in a wafer-level chip scale package. Generally speaking, a shielding plate should be at least slightly larger than the MEMS device structure it is shielding (e.g., a movable MEMS structure such as an accelerometer proof mass or a gyroscope resonator), and the shielding plate cannot be in contact with the MEMS device structure during or after wafer bonding. Thus, a recess is formed to ensure that there is sufficient cavity space away from the top surface of the MEMS device structure. The shielding plate is electrically conductive and can be biased, e.g., to the same voltage as the opposing MEMS device structure in order to maintain zero electrostatic attraction force between the MEMS device structure and the shielding plate.

Abstract: A targeting and tracking apparatus and method for optical transceivers is disclosed. The tracking function is performed internally by way of translating an internal optical fiber in the focal plane of the transceiver telescope using miniature motorized translation systems and/or micro-electro-mechanical systems (MEMS). The optical design of the transceiver provides a wide field of view and a pointing and tracking field of regard that is directly proportional to the translation of the optical fiber in the focal plane of the telescope. The apparatus and method can eliminate the need for external gimballing systems and scanning mirrors, and replace the gimballed optical beam steering function with motorized translation systems and/or MEMS that consumes very little power.

Abstract: A MEMS-based optical steering apparatus for free space optical transmitters, receivers, and transceivers is disclosed. The MEMS device comprises actuators linked to an optic fiber, the actuators operable to maneuver the optical fiber in the X-Y plane at the focal point of the transmitter, receiver, or transceiver. The MEMS device may thus be used to replace gimbals for beam steering applications.

Abstract: A beam steering apparatus and method for free space optical transceivers is disclosed. The beam steering function is performed internally by way of translating an internal optical fiber in the focal plane of the transceiver telescope using miniature micro-electro-mechanical systems (MEMS). The optical design of the transceiver provides a wide field of view and a pointing and tracking field of regard that is directly proportional to the translation of the optical fiber in the focal plane of the telescope. The apparatus and method can eliminate the need for external gimballing systems, and replace the gimballed free space optical beam steering function with MEMS that consumes very little power.