Abstract: Methods for replication and lift-off of micro/nano structures in single or multilayer thin films from a master substrate at wafer scale. The methods utilize polymeric materials with low-elastomeric properties to enhance the mechanical strength of the thin films during the replication and liftoff process from a master substrate, wherein the flexible polymer can have stand alone integrity. The master substrate can contain a surface relief which has a desired pattern to be replicated.

Abstract: An apparatus and method of fabrication for flexible pixelated Fabry-Perot filter. The flexible pixelated Fabry-Perot filter can include a first reflective layer, a second reflective layer, a Fabry-Perot cavity layer between the first reflective layer and the second reflective layer, wherein the Fabry-Perot cavity layer includes at least two regions of different cavity thickness, and a flexible substrate layer which structurally supports the first reflective layer, the Fabry-Perot cavity layer, and the second reflective layer. The flexible pixelated Fabry-Perot filter comprises, for example, random or specified mosaic arrangement of blocks, where each block has at least two counts of Fabry-Perot filter, which can act as pixel filters, having resonance transmissions in ultraviolet, visible or near/mid/far infrared regions. The constituent materials and their thicknesses allow the flexibility and fabrication.

Abstract: An apparatus including a three dimensional sub-wavelength structure for electromagnetic applications including a surface layer formed of a metal or semiconductor film, one or more additional layers stacked to the surface layer, one or more sub-wavelength apertures in the surface layer, and one or more cavities nearby the one or more sub-wavelength apertures. The size of each aperture is smaller than the wavelength of the electromagnetic field incident upon the three dimensional sub-wavelength structure. The one or more cavities provide accessibility for a dielectric material within and below each aperture. Each cavity may also contain at least one metal or semiconductor sub-wavelength particle. A method of fabricating a three dimensional sub-wavelength structure is also provided.