Abstract: Various embodiments of a laser illumination system are disclosed. In some examples, a system includes one or more lasers and a beam combiner configured to direct a combined light beam along a path. The system can include a polychroic optical assembly that receives the combined light beam and to output a first beam of the first light of the first wavelength and a second beam of the second light of the second wavelength. The second beam can be offset from the first beam. The polychroic optical assembly can be a prism assembly. The system can include one or more optical elements configured alter a distribution of light of the first beam to output a first output line at a sample plane, and to alter a distribution of light of the second beam to output a second output line at the sample plane.

Abstract: Various embodiments of a laser illumination system are disclosed. In an example, a system includes one or more lasers, a beam combiner (if multiple lasers are used) configured to direct a combined light beam along a path, a focusing optical element to receive the light beam and focus the received light towards a focus point, a MEMS mirror positioned to receive light from the focusing optical element and output a moving light beam, moving in an angular range ar1 and at a frequency f1, a collimating element configured to receive the beam output by the MEMS mirror and output a beam that is more collimated than the light received from the MEMS mirror, and a CLA positioned to receive the light beam from the collimating optical element, alter the received light beam, and output a substantially flat-top distribution of light that propagates through an objective lens to a target plane.