Abstract: A scanning system and methods for inspecting contents of a container. High-energy penetrating radiation collimated into a fan beam illuminates an inspected container from one side, while a plurality of detector plates are disposed on the opposite side of the container. Each detector plate has a plurality of detector modules, each of which, in turn, is disposed on a remotely activated alignment and has multiple detector elements. A controller governs the orientation of each of the plurality of detector plates based at least on the detector signal generated by its detector elements such that each detector element of each detector module of each detector plate may be aligned to within a specified fraction of the transverse dimension of the fan beam as measured at the exit slot.

Abstract: A scanning system and methods for inspecting contents of a container. High-energy penetrating radiation collimated into a fan beam illuminates an inspected container from one side, while a plurality of detector plates are disposed on the opposite side of the container. Each detector plate has a plurality of detector modules, each of which, in turn, is disposed on a remotely activated alignment and has multiple detector elements. A controller governs the orientation of each of the plurality of detector plates based at least on the detector signal generated by its detector elements such that each detector element of each detector module of each detector plate may be aligned to within a specified fraction of the transverse dimension of the fan beam as measured at the exit slot.

Abstract: A storage and retrieval system is provided for safely and efficiently storing reticles in a clean environment. An enclosed storage unit is provided for storing the reticles, and other items such as wafers and the like, in an environment which minimizes the amount of contaminants and is suitable for use in a semiconductor fabrication clean room. A retrieval unit is provided separate from the enclosed storage unit for accessing and staging the reticles before they enter and leave the storage unit for minimizing exposure of the storage unit. The storage unit includes a movable storage matrix having a plurality of bays for storing the reticles. The movable storage matrix is selectively moved or rotated by a drive mechanism that is located external to the storage unit so that the storage unit is substantially free of contaminant generating components.

Abstract: An automated door assembly is provided for sealing an opening in a barrier to a contaminant-free environment suitable for semiconductor wafer processing. The door assembly comprises a base pivotable toward and away from the opening along an arcuate path and a closure plate linearly movably coupled to the base and configured to a seal the opening in the barrier. The closure plate is removable in synchronization with the pivoting of the base to traverse a horizontal linear path into contact with the barrier to close the opening. A vacuum system is provided in conjunction with the door assembly to extract particles from the sealed environment. A sensor disposed on the closure plate is operable to sense the position of wafers or other objects disposed adjacent the opening, to detect misalignment or omission thereof.

Abstract: A storage and retrieval system is provided for safely and efficiently storing reticles in a clean environment. An enclosed storage unit is provided for storing the reticles, and other items such as wafers and the like, in an environment which minimizes the amount of contaminants and is suitable for use in a semiconductor fabrication clean room. A retrieval unit is provided separate from the enclosed storage unit for accessing and staging the reticles before they enter and leave the storage unit for minimizing exposure of the storage unit. The storage unit includes a movable storage matrix having a plurality of bays for storing the reticles. The movable storage matrix is selectively moved or rotated by a drive mechanism that is located external to the storage unit so that the storage unit is substantially free of contaminant generating components.

Abstract: An automated door assembly is provided for sealing an opening in a barrier to a contaminant-free environment suitable for semiconductor wafer processing. The door assembly comprises a base pivotable toward and away from the opening along an arcuate path and a closure plate linearly movably coupled to the base and configured to a seal the opening in the barrier. The closure plate is movable in synchronization with the pivoting of the base to traverse a horizontal linear path into contact with the barrier to close the opening. A vacuum system is provided in conjunction with the door assembly to extract particles from the sealed environment. A sensor disposed on the closure plate is operable to sense the position of wafers or other objects disposed adjacent the opening, to detect misalignment or omission thereof.