Abstract: A storage system for items such as substrate carriers includes at least one stocker including a plurality of storage areas each adapted to store at least one storage device. At least one movable support is arranged on the at least one stocker. A control controls movement of the at least one movable support at least between a first position wherein the at least one movable support receives the at least one storage device outside one of the storage areas and a second position wherein the at least one movable support is arranged substantially within the one of the storage areas.

Abstract: Methods, systems and apparatus for swapping pods within a semiconductor processing tool during a substrate processing cycle. A dirty pod carrying a substrate in need of processing is provided within the processing tool, and the substrate is transferred into a processing chamber thereof. At least one clean pod is also provided within the processing tool. Upon substrate processing completion, the processed substrate is transferred from the chamber directly into a clean pod within the processing tool. Wherein a plurality of substrates are processed within the chamber, a plurality of clean pods may be provided within the tool whereby the plurality of substrates are transferred into a single clean pod or split into subsets that are transferred into different clean pods within the processing tool. The clean pod(s) carrying the processed substrate(s) are then transferred to other tool(s) for continued semiconductor fabrication processing.

Abstract: A method for addressing high Work In Process (WIP) conditions for increasing throughput while minimizing risk in a manufacturing line. Selected products to be skipped over during high WIP conditions include determining toolsets having work in process exceeding a certain threshold. For each of the toolsets, products which meet a criteria for skipping are selected. The selected products skip over to the toolset used in a subsequent process step ahead of product failing to meet the criteria for skipping. Solutions to this problem also include the WIP of the current process step, nominal WIP and WIP of subsequent process steps. Candidate lots for skipping process steps are identified by referencing a matrix of parameters that includes yield and criticality.

Abstract: Processing a lot through a cluster tool having multiple processing chambers includes dispatching a lot to a cluster tool having a plurality of processing chambers, determining which of the plurality of processing chambers are active processing chambers and inactive processing chambers, setting a recipe for processing the lot utilizing the active processing chambers of the cluster tool, and processing a portion of the lot through the active processing chambers. Processing the lot further requires detecting that at least one of the inactive processing chambers is a re-activated processing chamber, selectively setting a new recipe for processing a remaining portion of the lot utilizing the active processing chambers and the re-activated processing chamber, and processing the remaining portion of the lot through the cluster tool based on the new recipe.

Abstract: A method of releasing units in a production facility includes forming a release plan for a production facility that establishes a number of units to be operated on by a production process, and creating a least one recipe bucket having an associated number of units. The method further requires evaluating production process throughput parameters, and comparing the number of units associated with the at least one recipe bucket with the number of units to be operated on by the production process and production process throughput parameters. If the number of units in the recipe bucket matches the number of units to be operated on by the production process and production process throughput parameters, recipe bucket is released to the production process, else the at least one recipe bucket is delayed from being released to the production process.

Abstract: A computing system for monitoring activity in an automated fabrication facility includes a computer operably coupled to an MES (Manufacturing Execution Systems) database having data relating to manufacturing operation events; and the computer also being operably coupled to an AMHS (Automated Material Handling Systems) database having data relating to movement of the work-in-process material lots between the manufacturing operations and the storage operations; and a solver product operatively installed on the computer for processing information regarding timing of the events and information regarding operation of the automated material handling system to generate a report regarding performance of the automated fabrication facility, wherein the report identifies information regarding a sequence of events having occurred in the manufacturing process.

Abstract: A method for addressing high Work In Process (WIP) conditions for increasing throughput while minimizing risk in a manufacturing line. Selected products to be skipped over during high WIP conditions include determining toolsets having work in process exceeding a certain threshold. For each of the toolsets, products which meet a criteria for skipping are selected. The selected products skip over to the toolset used in a subsequent process step ahead of product failing to meet the criteria for skipping. Solutions to this problem also include the WIP of the current process step, nominal WIP and WIP of subsequent process steps. Candidate lots for skipping process steps are identified by referencing a matrix of parameters that includes yield and criticality.

Abstract: A storage system for items such as substrate carriers includes at least one stocker including a plurality of storage areas each adapted to store at least one storage device. At least one movable support is arranged on the at least one stocker. A control controls movement of the at least one movable support at least between a first position wherein the at least one movable support receives the at least one storage device outside one of the storage areas and a second position wherein the at least one movable support is arranged substantially within the one of the storage areas.

Abstract: A storage buffer system for an automated material handling system (AMHS) includes a retractable buffer device disposed in proximity to a processing tool, the retractable buffer device having an extended position disposed directly below an overhead transport (OHT) vehicle path. The retractable buffer device further includes a retracted position that is removed from a process aisle space. In the extended position, the retractable buffer device is configured to facilitate loading and unloading of product therein without the use of lateral motion capability of an OHT vehicle.

Abstract: A clean room covering or enclosure for a portable computer, wherein the computer has a keyboard portion and a screen portion connected by a hinge foldable between closed and open positions. The enclosure comprises a flexible sleeve for receiving the keyboard portion of the portable computer, with the sleeve having an opening through which the keyboard portion is inserted and removed, a transparent portion for viewing and operating the keyboard and a gas permeable vent portion adapted to restrict flow of contaminant particles. A flexible flap extends from the sleeve portion and is adapted to wrap around and over the screen portion of the portable computer, and has a transparent portion for viewing the screen. The enclosure also includes a reclosable seal for securing the flexible flap around the screen portion. The reclosable seal preferably secures the flexible sleeve opening to restrict flow of contaminant particles.

Abstract: A method of transporting workpieces to tools in an automated transportation system dispatches an automated transport vehicle containing workpieces from a first location such as a first loadport to a tool when the automated transport vehicle is available for dispatch and loaded with the workpieces, irrespective of whether the tool is available to receive the workpieces. Next, the method directs the automated transport vehicle to travel from the first loadport, along an interbay loop to an intrabay loop. The intrabay loop comprises a transport route around the tool and the interbay loop comprises a transport route that connects the loadport to a plurality of intrabay loops. The method directs the automated transport vehicle to travel along the interbay loop and stop at a tool loadport of the tool only if the tool is available to work on the workpieces.

Abstract: A computing system for monitoring activity in an automated fabrication facility includes a computer operably coupled to an MES database having data relating to manufacturing operation events; and the computer also being operably coupled to an AMHS database having data relating to movement of the work-in-process material lots between the manufacturing operations and the storage operations; and a solver product operatively installed on the computer for processing information regarding timing of the events and information regarding operation of the automated material handling system to generate a report regarding performance of the automated fabrication facility, wherein the report identifies information regarding a sequence of events having occurred in the manufacturing process.

Abstract: A method of monitoring activity in an automated fabrication facility in which work-in-process material lots undergo manufacturing operations and storage operations includes tracking processing load and unload times of the lots at each of the manufacturing operations; tracking processing start and stop times of each of the manufacturing operations performed on the lots; tracking movement of automatically guided vehicles and cassettes containing the lots for purposes of transferring the lots between the manufacturing and storage operations; tracking storage load and unload times of the lots stored in the intermediate storage operations; tracking requests for the automated transfer of lots and a time each automated transfer request is made; and combining the processing load and unload times, the processing start and stop times, the storage load and unload times, the times associated with the requests for automated transfer, and information regarding the movement of the guided vehicles to generate a report.

Abstract: A method, system, and storage medium for facilitating a transport scheme in an automated material handling system environment are provided. The method includes detecting an occurrence of a trigger event while monitoring production operations in an automated material handling system environment, identifying a materials candidate to purge from a production line in response to the trigger event, production data captured relating to the materials candidate, and user-defined criteria for purging materials from the production line. The method also includes selecting a disposition plan for handling the materials candidate, generating a transport process job for the materials candidate for instructing the automated material handling system on executing the disposition plan, and transmitting the transport process job to the automated material handling system for execution.