Abstract: A single reflective optical element is constructed for use in interference lithography. The single reflective optical element is generally made up of at least two, and preferably four, polished reflective strips arranged to have particular angles relative to a laser beam passing through the optical element. A laser beam passing through the optical element will be partially reflected by the reflective strips to generate additional linearly polarized beams. The additional reflected beams overlap with the central laser beam and form an interference pattern as the beams pass out of the optical element. The generated polarized beams and interference pattern can be directed onto a photosensitive material to produce photonic crystals or photonic crystal templates.

Abstract: A single reflective optical element is constructed for use in interference lithography. The single reflective optical element is generally made up of at least two, and preferably four, polished reflective strips arranged to have particular angles relative to a laser beam passing through the optical element. A laser beam passing through the optical element will be partially reflected by the reflective strips to generate additional linearly polarized beams. The additional reflected beams overlap with the central laser beam and form an interference pattern as the beams pass out of the optical element. The generated polarized beams and interference pattern can be directed onto a photosensitive material to produce photonic crystals or photonic crystal templates.