Patents by Inventor Jeffrey Reichert

Jeffrey Reichert has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Methods and apparatus for defect localization
    Patent number: 6664541
    Abstract: The present invention includes a system for localization of defects in test samples. A sample is scanned using a particle beam. Some particles interact with conductive elements and may cause the emission of x-rays. Other particles can pass through the sample entirely and generate a current that can be measured. A higher current generated indicates less conductive material at the scan target that may mean a void, dishing, or erosion is present. Localization of a defect can be confirmed using an x-ray emission detector.
    Type: Grant
    Filed: November 21, 2001
    Date of Patent: December 16, 2003
    Assignee: KLA Tencor Technologies Corporation
    Inventors: Mehran Nasser-Ghodsi, Jeffrey Reichert
  • Methods and apparatus for defect localization
    Publication number: 20030062477
    Abstract: The present invention includes a system for localization of defects in test samples. A sample is scanned using a particle beam. Some particles interact with conductive elements and may cause the emission of x-rays. Other particles can pass through the sample entirely and generate a current that can be measured. A higher current generated indicates less conductive material at the scan target that may mean a void, dishing, or erosion is present. Localization of a defect can be confirmed using an x-ray emission detector.
    Type: Application
    Filed: November 21, 2001
    Publication date: April 3, 2003
    Applicant: KLA-Tencor Technologies Corporation
    Inventors: Mehran Nasser-Ghodsi, Jeffrey Reichert