Patents by Inventor Jeffrey S. Greenberg

Jeffrey S. Greenberg has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Optical profiler for films and substrates
    Patent number: 5042949
    Abstract: An optical non-contact surface profiler for determining (i) the surface profile of a transparent layer on a light-absorbing or opaque substrate, (ii) the surface profile of a light-absorbing or opaque substrate through a transparent layer, and (iii) the thickness profile of a transparent layer on a light-absorbing or opaque surface. A microscope alternatively configured in interferometric mode and in spectrophotometric mode provides phase data from an interference pattern and reflectance data from a reflectance pattern, respectively. A photo-sensing device receives the interference patterns and reflectance patterns and inputs the corresponding phase data and reflectance data to a computing device. The computing device processes the data to determine the appropriate surface or film thickness profiles.
    Type: Grant
    Filed: March 17, 1989
    Date of Patent: August 27, 1991
    Inventors: Jeffrey S. Greenberg, Jay E. Robinson, James M. Young, Daniel A. Cohen