Abstract: A docking mechanism docks a test head having a docking plate to a machine having a docking fixture when the docking plate is in a predetermined position with respect to the docking fixture. The test head has cam blocks which are moveable with respect to the docking plate. The docking fixture includes cam followers for engaging cam slots in the cam members when the docking plate is in the predetermined position and the cam blocks are in a first position, so that when the cam blocks are moved to a second position the docking plate and the docking fixture are drawn together. At least two sensors are carried by the docking plate and spaced apart from one another. The sensors cooperate with the docking fixture and are in a first state when the docking plate is not engaged with the docking fixture and the docking plate is being brought towards, but has not attained its predetermined position, and are in a second state when the docking plate attains the predetermined position.

Abstract: A load board is attached to the test head of a semiconductor tester and has a receptacle surface oriented substantially perpendicular to a Z-axis and presented toward a handler location. An adaptor plate is attached to a Z axis abutment structure and has a surface at a predetermined Z axis position relative to the receptacle surface of the load board, the surface of the adaptor plate being presented toward the handler location. At least three spacers are attached to the adaptor plate and project from the surface of the adaptor plate.

Abstract: A calibration unit for a semiconductor integrated circuit tester includes a frame, a manipulator arm which extends in cantilever fashion from the frame, and a calibration head attached to the manipulator arm at its distal end and having a downwardly directed test interface for mating with a test head in DUT up orientation.

Abstract: A load board is attached to the test head of a semiconductor tester and has a receptacle surface oriented substantially perpendicular to a Z-axis and presented toward a handler location. An adaptor plate is attached to a Z axis abutment structure and has a surface at a predetermined Z axis position relative to the receptacle surface of the load board, the surface of the adaptor plate being presented toward the handler location. At least three spacers are attached to the adaptor plate and project from the surface of the adaptor plate.

Abstract: A thermal isolation plate for a probe card comprises a stiff, generally annular plate made of a metal having good thermal conductivity. One surface of the plate has a low emissivity and the opposite surface has a low absorptivity. Preferably the surface of low absorptivity is a highly polished surface.