Abstract: Apparatuses, systems, and methods are disclosed for an integrated circuit with 2D field-effect transistors and on-chip thin film layer deposition with electrical characterization. A corresponding layer structure and manufacturing process are disclosed. The system includes a measurement controller that determines transfer curve information and an analysis module that generates parameters for determining thickness and/or porosity and a thin film deposition controller that controllers thin film deposition using the parameters. Methods include performing liquid mediated deposition of one or more thin film layers on the channel surface and obtaining transfer curve information by generating time dependent measurement vectors for the 2D FETs and controlling and/or performing electrical characterization of the of thin film layers based on the measurement vectors. The disclosed methods may be implemented by the disclosed integrated circuit and the disclosed system.