Patents by Inventor Jeffry Joseph Sniegowski
Jeffry Joseph Sniegowski has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20230223273Abstract: The present invention relates to methods of delayering a semiconductor integrated circuit die or wafer. In at least one aspect, the method includes exposing a die or wafer to plasma of an etching gas and detecting exposure of one or more metal layers within the die. In one aspect of the invention, the plasma of the etching gas is non-selective and removes all materials in a layer at about the same rate. In another aspect of the invention, two different plasmas of corresponding etching gases are employed with each plasma of the etching gas being selective, thus necessitating the sequential use of both plasmas of corresponding etching gases to remove all materials in a layer.Type: ApplicationFiled: February 14, 2023Publication date: July 13, 2023Inventors: Randy J. Shul, Caitlin Rochford Friedman, Gregory Paul Salazar, Michael J. Rye, John Mudrick, Craig Y. Nakakura, Jeffry Joseph Sniegowski, Karl Douglas Greth
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Patent number: 11664238Abstract: The present invention relates to methods of delayering a semiconductor integrated circuit die or wafer. In at least one aspect, the method includes exposing a die or wafer to plasma of an etching gas and detecting exposure of one or more metal layers within the die. In one aspect of the invention, the plasma of the etching gas is non-selective and removes all materials in a layer at about the same rate. In another aspect of the invention, two different plasmas of corresponding etching gases are employed with each plasma of the etching gas being selective, thus necessitating the sequential use of both plasmas of corresponding etching gases to remove all materials in a layer.Type: GrantFiled: July 29, 2020Date of Patent: May 30, 2023Assignee: National Technology & Engineering Solutions of Sandia, LLCInventors: Randy J. Shul, Caitlin Rochford Friedman, Gregory Paul Salazar, Michael J. Rye, John Mudrick, Craig Y. Nakakura, Jeffry Joseph Sniegowski, Karl Douglas Greth
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Patent number: 9076612Abstract: An integrating impact switch that can discriminate between accelerations due to different stimuli is provided. Embodiments of the present invention actuate only in response to an acceleration whose magnitude is equal to or greater than an acceleration threshold for a predetermined continuous period of time. Embodiments of the present invention comprise an impact switch having a throw that is operatively coupled with a viscous damper that dampens motion of the throw. As a result, a stimulus that imparts an acceleration that meets or exceeds an acceleration threshold for a time period less than a predetermined time-period threshold does not actuate the switch. A stimulus that imparts an acceleration whose magnitude is equal to or greater than the acceleration threshold for a time period equal to the time-period threshold, however, does actuate the switch.Type: GrantFiled: August 15, 2014Date of Patent: July 7, 2015Assignee: HT MICROANALYTICAL, INC.Inventors: Todd Richard Christenson, Jeffry Joseph Sniegowski
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Publication number: 20150162152Abstract: An integrating impact switch that can discriminate between accelerations due to different stimuli is provided. Embodiments of the present invention actuate only in response to an acceleration whose magnitude is equal to or greater than an acceleration threshold for a predetermined continuous period of time. Embodiments of the present invention comprise an impact switch having a throw that is operatively coupled with a viscous damper that dampens motion of the throw. As a result, a stimulus that imparts an acceleration that meets or exceeds an acceleration threshold for a time period less than a predetermined time-period threshold does not actuate the switch. A stimulus that imparts an acceleration whose magnitude is equal to or greater than the acceleration threshold for a time period equal to the time-period threshold, however, does actuate the switch.Type: ApplicationFiled: August 15, 2014Publication date: June 11, 2015Inventors: Todd Richard Christenson, Jeffry Joseph Sniegowski
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Patent number: 8809706Abstract: An integrating impact switch that can discriminate between accelerations due to different stimuli is provided. Embodiments of the present invention actuate only in response to an acceleration whose magnitude is equal to or greater than an acceleration threshold for a predetermined continuous period of time. Embodiments of the present invention comprise an impact switch having a throw that is operatively coupled with a viscous damper that dampens motion of the throw. As a result, a stimulus that imparts an acceleration that meets or exceeds an acceleration threshold for a time period less than a predetermined time-period threshold does not actuate the switch. A stimulus that imparts an acceleration whose magnitude is equal to or greater than the acceleration threshold for a time period equal to the time-period threshold, however, does actuate the switch.Type: GrantFiled: July 3, 2013Date of Patent: August 19, 2014Assignee: HT MicroAnalytical, Inc.Inventors: Todd Richard Christenson, Jeffry Joseph Sniegowski
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Publication number: 20130301182Abstract: An integrating impact switch that can discriminate between accelerations due to different stimuli is provided. Embodiments of the present invention actuate only in response to an acceleration whose magnitude is equal to or greater than an acceleration threshold for a predetermined continuous period of time. Embodiments of the present invention comprise an impact switch having a throw that is operatively coupled with a viscous damper that dampens motion of the throw. As a result, a stimulus that imparts an acceleration that meets or exceeds an acceleration threshold for a time period less than a predetermined time-period threshold does not actuate the switch. A stimulus that imparts an acceleration whose magnitude is equal to or greater than the acceleration threshold for a time period equal to the time-period threshold, however, does actuate the switch.Type: ApplicationFiled: July 3, 2013Publication date: November 14, 2013Inventors: Todd Richard Christenson, Jeffry Joseph Sniegowski
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Patent number: 7060081Abstract: A cutting blade (56) having a cutting edge (80) defined by an intersection of a first cutting edge surface (72) and a second cutting edge surface (66) is disclosed. The angle between the first cutting edge surface (72) and the second cutting edge surface (66) defines a blade angle (?). The blade (56) may be fabricated from a wafer (130) by an anisotropic etch. An upper surface (134) of the wafer (130) is defined by a first set of 3 Miller indices, where at least one individual Miller index of this first set has an absolute value greater than 3. A top surface (60) of the blade (56) is defined by part of the upper surface (134) of the wafer (130). The anisotropic etch proceeds until reaching a particular crystallographic plane to define the first cutting edge surface (72). Having the top surface (60) of the blade (56) defined by the noted set of 3 Miller indices increases the potential that a blade angle (?) of a desired magnitude may be realized.Type: GrantFiled: May 7, 2003Date of Patent: June 13, 2006Inventors: Paul Jackson McWhorter, Samuel Lee Miller, Jeffry Joseph Sniegowski, Murray Steven Rodgers
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Patent number: 7055975Abstract: A microelectromechanical system is disclosed that constrains the direction of a force acting on a first load, where the force originates from the interaction of the first load and a second load. In particular, the direction of a force acting on the first load is caused to be substantially parallel with a motion of the first load. This force direction constraint is achieved by a force isolator microstructure that contains no rubbing or contacting surfaces. Various embodiments of structures/methods to achieve this force direction constraint using a force isolator microstructure are disclosed.Type: GrantFiled: March 12, 2002Date of Patent: June 6, 2006Assignee: MEMX, Inc.Inventors: Samuel Lee Miller, Murray Steven Rodgers, Stephen Matthew Barnes, Jeffry Joseph Sniegowski, Paul Jackson McWhorter
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Patent number: 6989582Abstract: The present invention generally relates to a die perimeter region of a die having a microelectromechanical assembly fabricated thereon. This die perimeter region may be configured to facilitate electrically interconnecting adjacent die on a wafer. Moreover, this die perimeter region may be configured to facilitate separating the die from a wafer.Type: GrantFiled: June 6, 2003Date of Patent: January 24, 2006Assignee: MEMX, Inc.Inventors: Jeffry Joseph Sniegowski, Murray Steven Rodgers
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Patent number: 6847152Abstract: The present invention provides a MEM system (10) having a platform (14) that is both elevatable from the substrate (12) on which it is fabricated and tiltable with one, two or more degrees of freedom with respect to the substrate (12). In one embodiment, the MEM system (10) includes the platform (14), a pair of A-frame structures (40), and two pairs of actuators (30) formed on the substrate (12). Ends (46A) of rigid members (46) extending from apexes (40A) of the A-frame structures (40) are attached to the platform (14) by compliant members (48A, 48B). The platform (14) is also attached to the substrate (12) by a compliant member (48C). The A-frame structures (40) are separately pivotable about bases (40B) thereof. Each pair of actuators (30) is coupled through a yoke (32) and displacement multiplier (34) to one of the A-frame structures (40) and is separately operable to effect pivoting of the A-frame structures (40) with respect to the substrate (12) by equal or unequal angular amounts.Type: GrantFiled: October 30, 2003Date of Patent: January 25, 2005Assignee: MEMX, Inc.Inventors: Samuel Lee Miller, Murray Steven Rodgers, Stephen Matthew Barnes, Jeffry Joseph Sniegowski, Paul Jackson McWhorter
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Patent number: 6831391Abstract: The present invention provides a MEM system (10) having a platform (14) that is both elevatable from the substrate (12) on which it is fabricated and tiltable with one, two or more degrees of freedom with respect to the substrate (12). In one embodiment, the MEM system (10) includes the platform (14), a pair of A-frame structures (40), and two pairs of actuators (30) formed on the substrate (12). Ends (46A) of rigid members (46) extending from apexes (40A) of the A-frame structures (40) are attached to the platform (14) by compliant members (48A, 48B). The platform (14) is also attached to the substrate (12) by a compliant member (48C). The A-frame structures (40) are separately pivotable about bases (40B) thereof. Each pair of actuators (30) is coupled through a yoke (32) and displacement multiplier (34) to one of the A-frame structures (40) and is separately operable to effect pivoting of the A-frame structures (40) with respect to the substrate (12) by equal or unequal angular amounts.Type: GrantFiled: October 30, 2003Date of Patent: December 14, 2004Assignee: MEMX, Inc.Inventors: Samuel Lee Miller, Murray Steven Rodgers, Stephen Matthew Barnes, Jeffry Joseph Sniegowski, Paul Jackson McWhorter
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Publication number: 20040204726Abstract: A blade separation fixture (300) is disclosed. A wafer (130) is positioned on the fixture (300). This wafer (130) includes a plurality of cutting blades (56) that are initially spaced above the fixture (300). Blade handles (24) will typically already have been mounted on each of the various cutting blades (56) at this time. In any case, each of the various cutting blades (56) are separated from the wafer (130) by applying an appropriate downwardly directed force. Separated blades (56) in effect pivot into an inclined position against the fixture (300) without having their corresponding cutting edges (80) contact the fixture (300).Type: ApplicationFiled: March 17, 2003Publication date: October 14, 2004Applicant: MEMX, INC.Inventors: Samuel Lee Miller, Norman Frank Smith, Stephen Matthew Barnes, Jeffry Joseph Sniegowski
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Publication number: 20040181950Abstract: A cutting tool (20) for a microkeratome (4) is disclosed. This cutting tool (20) includes a blade handle (24) and a separate cutting blade (56). Both the blade handle (24) and cutting blade (56) include features to register or align a cutting edge (80) of the cutting blade (56) with a microkeratome registration surface (28) of the blade handle (24). This microkeratome registration surface (28) of the blade handle (24) interfaces with a cutting tool registration surface (14) of a head assembly (10) of the microkeratome (4) on which the cutting tool (20) is installed. Therefore, the cutting edge (80) of the cutting blade (56) is registered or aligned relative to the cutting tool registration surface (14) of the head assembly (10) of the microkeratome (4).Type: ApplicationFiled: March 17, 2003Publication date: September 23, 2004Inventors: Murray Steven Rodgers, Norman Frank Smith, Jeffry Joseph Sniegowski, Stephen Matthew Barnes, Paul Jackson McWhorter
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Publication number: 20040186498Abstract: A microkeratome blade (54) that that is fabricated from a wafer (130) is disclosed. The blade (54) includes a notch (110) on its rear surface (106). During fabrication of the blade (54) from the wafer (130), a blade support tab (131) provides a structural interconnection between the wafer (130) and the blade (56). This blade support tab (131) extends within the notch (110) and merges with the blade (56). A score (132) extends across at least part of the blade support tab (131) to facilitate separation of the blade (56) from the wafer (130) by fracturing or the like. This score (132) is positioned such that the surface defined by separating the blade (56) from the wafer (130) at least generally along the score (132) is “disposed within” the notch (110) or recessed relative to a rearwardmost portion of the rear surface (106) of the blade (56).Type: ApplicationFiled: May 7, 2003Publication date: September 23, 2004Inventors: Stephen Matthew Barnes, Jeffry Joseph Sniegowski, Norman Frank Smith
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Publication number: 20040182824Abstract: A method for fabricating a cutting blade (56) from a wafer (130) is disclosed. The wafer (130) is etched to define part of the perimeter of the blade (56). This etch also defines a blade support (131) that maintains a structural interconnection between the blade (56) and the wafer (130). A score (132) is formed across at least part of the blade support tab (131). Fracturing the blade support tab (131) at least generally along the score (132) at some point in time after the completion of the etch facilitates the separation of the blade (56) from the wafer (130).Type: ApplicationFiled: May 7, 2003Publication date: September 23, 2004Inventors: Stephen Matthew Barnes, Jeffry Joseph Sniegowski, Norman Frank Smith
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Publication number: 20040186497Abstract: A cutting blade (56) having a cutting edge (80) defined by an intersection of a first cutting edge surface (72) and a second cutting edge surface (66) is disclosed. The angle between the first cutting edge surface (72) and the second cutting edge surface (66) defines a blade angle (&thgr;). The blade (56) may be fabricated from a wafer (130) by an anisotropic etch. An upper surface (134) of the wafer (130) is defined by a first set of 3 Miller indices, where at least one individual Miller index of this first set has an absolute value greater than 3. A top surface (60) of the blade (56) is defined by part of the upper surface (134) of the wafer (130). The anisotropic etch proceeds until reaching a particular crystallographic plane to define the first cutting edge surface (72). Having the top surface (60) of the blade (56) defined by the noted set of 3 Miller indices increases the potential that a blade angle (&thgr;) of a desired magnitude may be realized.Type: ApplicationFiled: May 7, 2003Publication date: September 23, 2004Inventors: Paul Jackson McWhorter, Samuel Lee Miller, Jeffry Joseph Sniegowski, Murray Steven Rodgers
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Patent number: 6794793Abstract: The present invention provides a MEM system (10) having a platform (14) that is both elevatable from the substrate (12) on which it is fabricated and tiltable with one, two or more degrees of freedom with respect to the substrate (12). In one embodiment, the MEM system (10) includes the platform (14), a pair of A-frame structures (40), and two pairs of actuators (30) formed on the substrate (12). Ends (46A) of rigid members (46) extending from apexes (40A) of the A-frame structures (40) are attached to the platform (14) by compliant members (48A, 48B). The platform (14) is also attached to the substrate (12) by a compliant member (48C). The A-frame structures (40) are separately pivotable about bases (40B) thereof. Each pair of actuators (30) is coupled through a yoke (32) and displacement multiplier (34) to one of the A-frame structures (40) and is separately operable to effect pivoting of the A-frame structures (40) with respect to the substrate (12) by equal or unequal angular amounts.Type: GrantFiled: September 27, 2001Date of Patent: September 21, 2004Assignee: Memx, Inc.Inventors: Samuel Lee Miller, Murray Steven Rodgers, Stephen Matthew Barnes, Jeffry Joseph Sniegowski, Paul Jackson McWhorter
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Patent number: 6774535Abstract: The present invention provides a MEM system (10) having a platform (14) that is both elevatable from the substrate (12) on which it is fabricated and tiltable with one, two or more degrees of freedom with respect to the substrate (12). In one embodiment, the MEM system (10) includes the platform (14), a pair of A-frame structures (40), and two pairs of actuators (30) formed on the substrate (12). Ends (46A) of rigid members (46) extending from apexes (40A) of the A-frame structures (40) are attached to the platform (14) by compliant members (48A, 48B). The platform (14) is also attached to the substrate (12) by a compliant member (48C). The A-frame structures (40) are separately pivotable about bases (40B) thereof. Each pair of actuators (30) is coupled through a yoke (32) and displacement multiplier (34) to one of the A-frame structures (40) and is separately operable to effect pivoting of the A-frame structures (40) with respect to the substrate (12) by equal or unequal angular amounts.Type: GrantFiled: October 30, 2003Date of Patent: August 10, 2004Assignee: Memx, Inc.Inventors: Samuel Lee Miller, Murray Steven Rodgers, Stephen Matthew Barnes, Jeffry Joseph Sniegowski, Paul Jackson McWhorter
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Publication number: 20040090144Abstract: The present invention provides a MEM system (10) having a platform (14) that is both elevatable from the substrate (12) on which it is fabricated and tiltable with one, two or more degrees of freedom with respect to the substrate (12). In one embodiment, the MEM system (10) includes the platform (14), a pair of A-frame structures (40), and two pairs of actuators (30) formed on the substrate (12). Ends (46A) of rigid members (46) extending from apexes (40A) of the A-frame structures (40) are attached to the platform (14) by compliant members (48A, 48B). The platform (14) is also attached to the substrate (12) by a compliant member (48C). The A-frame structures (40) are separately pivotable about bases (40B) thereof. Each pair of actuators (30) is coupled through a yoke (32) and displacement multiplier (34) to one of the A-frame structures (40) and is separately operable to effect pivoting of the A-frame structures (40) with respect to the substrate (12) by equal or unequal angular amounts.Type: ApplicationFiled: October 30, 2003Publication date: May 13, 2004Inventors: Samuel Lee Miller, Murray Steven Rodgers, Stephen Matthew Barnes, Jeffry Joseph Sniegowski, Paul Jackson McWhorter
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Publication number: 20040090143Abstract: The present invention provides a MEM system (10) having a platform (14) that is both elevatable from the substrate (12) on which it is fabricated and tiltable with one, two or more degrees of freedom with respect to the substrate (12). In one embodiment, the MEM system (10) includes the platform (14), a pair of A-frame structures (40), and two pairs of actuators (30) formed on the substrate (12). Ends (46A) of rigid members (46) extending from apexes (40A) of the A-frame structures (40) are attached to the platform (14) by compliant members (48A, 48B). The platform (14) is also attached to the substrate (12) by a compliant member (48C). The A-frame structures (40) are separately pivotable about bases (40B) thereof. Each pair of actuators (30) is coupled through a yoke (32) and displacement multiplier (34) to one of the A-frame structures (40) and is separately operable to effect pivoting of the A-frame structures (40) with respect to the substrate (12) by equal or unequal angular amounts.Type: ApplicationFiled: October 30, 2003Publication date: May 13, 2004Inventors: Samuel Lee Miller, Murray Steven Rodgers, Stephen Matthew Barnes, Jeffry Joseph Sniegowski, Paul Jackson McWhorter