Patents by Inventor Jen-Hom Chen

Jen-Hom Chen has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Temperature-sensing wafer position detection system and method
    Patent number: 6980876
    Abstract: A temperature-sensing wafer position detection system and method which uses temperature to determine whether a wafer is properly positioned on a bake plate prior to commencement of a photolithography baking process, for example. The system includes a bake plate and a temperature-sensing apparatus which engages the bake plate and measures the change in temperature (?T) of the bake plate over a specified time interval to determine whether the wafer is properly or improperly positioned on the support. In the event that the ?T of the bake plate is at least as great as a given temperature change threshold value over a specified time interval, this indicates that the wafer is properly positioned for processing.
    Type: Grant
    Filed: February 26, 2004
    Date of Patent: December 27, 2005
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Mu-Tsang Lin, Kong-Hsin Teng, Tien-Wen Wang, Jen-Hom Chen
  • Temperature-sensing wafer position detection system and method
    Publication number: 20050192699
    Abstract: A temperature-sensing wafer position detection system and method which uses temperature to determine whether a wafer is properly positioned on a bake plate prior to commencement of a photolithography baking process, for example. The system includes a bake plate and a temperature-sensing apparatus which engages the bake plate and measures the change in temperature (?T) of the bake plate over a specified time interval to determine whether the wafer is properly or improperly positioned on the support. In the event that the ?T of the bake plate is at least as great as a given temperature change threshold value over a specified time interval, this indicates that the wafer is properly positioned for processing.
    Type: Application
    Filed: February 26, 2004
    Publication date: September 1, 2005
    Inventors: Mu-Tsang Lin, Kong-Hsin Teng, Tien-Wen Wang, Jen-Hom Chen