Patents by Inventor Jen-Hsi Chiu

Jen-Hsi Chiu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • SUB-RESOLUTION ASSIST FEATURE OF A PHOTOMASK
    Publication number: 20080241708
    Abstract: The present disclosure provides a mask. The mask includes a transparent substrate, a main feature, and an assistant feature. The main feature includes attenuating material and is disposed on the substrate. The assistant feature includes a sub-resolution feature providing a phase shift. The assistant feature is spaced a distance from the main feature. The assistant feature includes a trench defined by the substrate. The present disclosure further provides a method of fabricating the mask.
    Type: Application
    Filed: April 2, 2007
    Publication date: October 2, 2008
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Cheng-Ming Lin, Jen-Hsi Chiu