Patents by Inventor Jen-Shun Shih

Jen-Shun Shih has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Chemical solution coating apparatus
    Publication number: 20020056413
    Abstract: A chemical solution coating apparatus, having a carrier board and a plurality of spray apparatuses. The carrier board is to carry the wafer to be coated, and the spray apparatuses are located at a periphery of the carrier board to evenly spray chemical solution on the wafer. Since the chemical solution is coated on the wafer in a spray manner, so that the unnecessary lapse and process cost are avoided. The number and spraying angle spray apparatuses can be adjusted to reach an optimum status.
    Type: Application
    Filed: December 1, 2000
    Publication date: May 16, 2002
    Inventors: Kuei-Hsi Lai, En-Tien Tan, Cha-Ming Kuo, Jen-Shun Shih