Patents by Inventor Jeng-Bang Yau

Jeng-Bang Yau has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20180083125
    Abstract: A method of controlling formation of junctions in a lateral bipolar junction transistor comprises: providing a starting substrate comprising a bulk silicon material as a handle substrate, a buried oxide layer on the handle substrate, and an intrinsic base semiconductor layer of germanium on the buried oxide layer; forming an extrinsic base layer on the intrinsic base semiconductor layer; etching at least a portion of the base layer; disposing a sidewall spacer on a side of the base layer; disposing a faceted germanium layer adjacent the sidewall spacer; recessing the faceted germanium layer and the intrinsic base semiconductor layer below the sidewall spacer; using a hot angle ion implantation technique to implant ions into a side of the intrinsic base semiconductor layer to form a junction edge/profile; annealing the implanted ions; and epitaxially growing a Si or SiGe layer on the germanium layer and the junction edge/profile.
    Type: Application
    Filed: September 20, 2016
    Publication date: March 22, 2018
    Inventors: Pouya HASHEMI, Kam-Leung LEE, Tak H. NING, Jeng-Bang YAU
  • Publication number: 20180068950
    Abstract: A method of forming a contact to a semiconductor device is provided that forms an alloy composed of nickel (Ni), platinum (Pt), aluminum (Al), titanium (Ti) and a semiconductor material. The methods may include forming a nickel and platinum semiconductor alloy at a base of a via. A titanium layer having an angstrom scale thickness is deposited in the via in contact with the nickel platinum semiconductor alloy. An aluminum containing fill is deposited atop the titanium layer. A forming gas anneal including an oxygen containing atmosphere is applied to the structure to provide a contact alloy comprising nickel, platinum, aluminum, titanium and a semiconductor element from the contact surface of the semiconductor device.
    Type: Application
    Filed: September 6, 2016
    Publication date: March 8, 2018
    Inventors: John Bruley, Jack O. Chu, Kam-Leung Lee, Ahmet S. Ozcan, Paul M. Solomon, Jeng-bang Yau
  • Publication number: 20180061853
    Abstract: An amplifier circuit including a substrate layer and a plurality of lateral bipolar junction transistors positioned entirely above the substrate. The lateral bipolar junction transistors include a plurality of monolithic emitter-collector regions coplanar to each other. Each of the emitter-collector regions is both an emitter region of a first bipolar junction transistor a collector region of a second bipolar junction transistor from the lateral bipolar junction transistors. Accordingly, the lateral bipolar junction transistors are electrically coupled in series circuit at the emitter-collector regions.
    Type: Application
    Filed: August 28, 2016
    Publication date: March 1, 2018
    Inventors: Alberto Valdes Garcia, Tak H. Ning, Jean-Olivier Plouchart, Ghavam G. Shahidi, Jeng-Bang Yau
  • Publication number: 20180040723
    Abstract: Semiconductor structure including germanium-on-insulator lateral bipolar junction transistors and methods of fabricating the same generally include formation of a silicon passivation layer at an interface between the insulator layer and a germanium layer.
    Type: Application
    Filed: August 16, 2017
    Publication date: February 8, 2018
    Inventors: Kevin K. Chan, Tak H. Ning, Jeng-Bang Yau
  • Patent number: 9887264
    Abstract: A semiconductor structure includes a plurality of semiconductor fins located on a semiconductor substrate, in which each of the semiconductor fins comprises a sequential stack of a buffered layer including a III-V semiconductor material and a channel layer including a III-V semiconductor material. The semiconductor structure further includes a gap filler material surrounding the semiconductor fins and including a plurality of trenches therein. The released portions of the channel layers of the semiconductor fins located in the trenches constitute nanowire channels of the semiconductor structure, and opposing end portions of the channel layers of the semiconductor fins located outside of the trenches constitute a source region and a drain region of the semiconductor structure, respectively. In addition, the semiconductor structure further includes a plurality of gates structures located within the trenches that surround the nanowire channels in a gate all around configuration.
    Type: Grant
    Filed: August 24, 2016
    Date of Patent: February 6, 2018
    Assignee: International Business Machines Corporation
    Inventors: Jack O. Chu, Szu Lin Cheng, Isaac Lauer, Kuen-Ting Shiu, Jeng-Bang Yau
  • Patent number: 9887278
    Abstract: After forming a trench extending through an insulator layer and an underlying top semiconductor portion that is comprised of a first semiconductor material and a dopant of a first conductivity type to define an emitter and a collector on opposite sides of the trench in the top semiconductor portion, an intrinsic base comprising a second semiconductor material having a bandgap less than a bandgap of the first semiconductor material and a dopant of a second conductivity type opposite the first conductivity type is formed in a lower portion the trench by selective epitaxial growth. The intrinsic base protrudes above the top semiconductor portion and is laterally surrounded by entire top semiconductor portion and a portion of the insulator layer. An extrinsic base is then formed on top of the intrinsic base to fill a remaining volume of the trench by a deposition process.
    Type: Grant
    Filed: September 28, 2015
    Date of Patent: February 6, 2018
    Assignee: International Business Machines Corporation
    Inventors: Jin Cai, Kevin K. Chan, Christopher P. D'Emic, Tak H. Ning, Jeng-Bang Yau
  • Publication number: 20170373149
    Abstract: A method for forming an overlap transistor includes forming a gate structure over a III-V material, wet cleaning the III-V material on side regions adjacent to the gate structure and plasma cleaning the III-V material on the side regions adjacent to the gate structure. The III-V material is plasma doped on the side regions adjacent to the gate structure to form plasma doped extension regions that partially extend below the gate structure.
    Type: Application
    Filed: June 28, 2016
    Publication date: December 28, 2017
    Inventors: Robert L. Bruce, Kevin K. Chan, Sebastian U. Engelmann, Renee T. Mo, Christopher Scerbo, Hongwen Yan, Jeng-Bang Yau
  • Patent number: 9853109
    Abstract: A method is presented for forming a diffusion barrier in a field effect transistor with a source. A raised source is formed at least partially on the source with the raised source comprising III-V material. An interfacial layer is formed at least partially on the raised source with the interfacial layer comprising silicon or germanium. A metal layer is formed at least partially on the interfacial layer with the metal layer comprising transition metal. The diffusion barrier is formed at least partially on the raised source with the diffusion barrier layer comprising transition metal from the metal layer bonded to silicon or germanium from the interfacial layer. Similar processing forms a corresponding diffusion barrier on a raised drain.
    Type: Grant
    Filed: April 22, 2016
    Date of Patent: December 26, 2017
    Assignee: International Business Machines Corporation
    Inventors: Kevin K. Chan, Cheng-Wei Cheng, Jack Oon Chu, Yanning Sun, Jeng-Bang Yau
  • Patent number: 9852938
    Abstract: After forming an epitaxial germanium layer over a germanium-on-insulator substrate including an insulator layer and a doped germanium layer overlying the insulator layer, the doped germanium layer is selectively removed and a passivation layer is formed within a space between the epitaxial germanium layer and the insulator layer that is formed by removal of the doped germanium layer. A lateral bipolar transistor is subsequently formed in the epitaxial germanium layer.
    Type: Grant
    Filed: August 8, 2016
    Date of Patent: December 26, 2017
    Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Kevin K. Chan, Tak H. Ning, Jeng-Bang Yau
  • Patent number: 9799756
    Abstract: Semiconductor structure including germanium-on-insulator lateral bipolar junction transistors and methods of fabricating the same generally include formation of a silicon passivation layer at an interface between the insulator layer and a germanium layer.
    Type: Grant
    Filed: August 5, 2016
    Date of Patent: October 24, 2017
    Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Kevin K. Chan, Tak H. Ning, Jeng-Bang Yau
  • Publication number: 20170263656
    Abstract: An integrated radiation sensor for detecting the presence of an environmental material and/or condition includes a sensing structure and first and second lateral bipolar junction transistors (BJTs) having opposite polarities. The first lateral BJT has a base that is electrically coupled to the sensing structure and is configured to generate an output signal indicative of a change in stored charge in the sensing structure. The second lateral BJT is configured to amplify the output signal of the first bipolar junction transistor. The first and second lateral BJTs, the sensing structure, and the substrate on which they are formed comprise a monolithic structure.
    Type: Application
    Filed: May 22, 2017
    Publication date: September 14, 2017
    Inventors: MICHAEL S. GORDON, TAK H. NING, KENNETH P. RODBELL, JENG-BANG YAU
  • Publication number: 20170227485
    Abstract: An exemplary biosensor sensor for detecting the presence of a biological material includes an SOI substrate, a BJT formed on at least a portion of the substrate, and a sensing structure formed on at least a portion of an upper surface of the BJT. The BJT includes an emitter region, a collector region and a self-aligned epitaxially grown intrinsic base region laterally adjacent to the emitter and collector regions. The sensing structure includes an opening, centered above and exposing the intrinsic base region, and at least one dielectric layer formed in the opening and contacting at least a portion of the intrinsic base region. The dielectric layer is configured to respond to charges in biological molecules.
    Type: Application
    Filed: February 9, 2016
    Publication date: August 10, 2017
    Inventors: Jin Cai, Tak H. Ning, Jeng-Bang Yau, Sufi Zafar
  • Patent number: 9726631
    Abstract: An exemplary biosensor sensor for detecting the presence of a biological material includes an SOI substrate, a BJT formed on at least a portion of the substrate, and a sensing structure formed on at least a portion of an upper surface of the BJT. The BJT includes an emitter region, a collector region and a self-aligned epitaxially grown intrinsic base region laterally adjacent to the emitter and collector regions. The sensing structure includes an opening, centered above and exposing the intrinsic base region, and at least one dielectric layer formed in the opening and contacting at least a portion of the intrinsic base region. The dielectric layer is configured to respond to charges in biological molecules.
    Type: Grant
    Filed: February 9, 2016
    Date of Patent: August 8, 2017
    Assignee: International Business Machines Corporation
    Inventors: Jin Cai, Tak H. Ning, Jeng-Bang Yau, Sufi Zafar
  • Patent number: 9704569
    Abstract: A programmable read-only-memory (ROM) cell and method of operating. The ROM cell comprises: a silicon-on-insulator (SOI) substrate having a bottom substrate layer, an insulating layer formed over said bottom substrate layer, and a top semiconductor substrate layer. A series coupled CMOS NFET and PFET device is formed at said semiconductor substrate layer, each NFET and PFET device having a respective gate, drain and source terminals, wherein a source terminal of said PFET device is electrically shorted to a drain terminal of said NFET device. An injected charge storage layer is provided at an interface between a channel formed beneath a gate terminal of said PFET and the insulating layer. The charge storage layer having trapped charge carriers representative of a logic bit value. The stored bit value is physically undetectable data. Biasing conditions established at the substrate and PFET device enable injection of charge carriers into the charge storage layer.
    Type: Grant
    Filed: October 6, 2016
    Date of Patent: July 11, 2017
    Assignee: International Business Machines Corporation
    Inventors: Tak H. Ning, Ghavam G. Shahidi, Jeng-Bang Yau
  • Patent number: 9691886
    Abstract: A method of forming a semiconductor structure includes providing an emitter and a collector on a surface of an insulator layer. The emitter and the collector are spaced apart and have a doping of a first conductivity type. An intrinsic base is formed between the emitter and the collector and on the insulator layer by epitaxially growing the intrinsic base from at least a vertical surface of the emitter and a vertical surface of the collector. The intrinsic base has a doping of a second conductivity type opposite to the first conductivity type, and a first heterojunction exists between the emitter and the intrinsic base and a second heterojunction exists between the collector and the intrinsic base.
    Type: Grant
    Filed: December 30, 2015
    Date of Patent: June 27, 2017
    Assignee: International Business Machines Corporation
    Inventors: Jin Cai, Kevin K. Chan, Christopher P. D'Emic, Tak H. Ning, Jeng-Bang Yau
  • Publication number: 20170170270
    Abstract: A semiconductor structure includes a plurality of semiconductor fins located on a semiconductor substrate, in which each of the semiconductor fins comprises a sequential stack of a buffered layer including a III-V semiconductor material and a channel layer including a III-V semiconductor material. The semiconductor structure further includes a gap filler material surrounding the semiconductor fins and including a plurality of trenches therein. The released portions of the channel layers of the semiconductor fins located in the trenches constitute nanowire channels of the semiconductor structure, and opposing end portions of the channel layers of the semiconductor fins located outside of the trenches constitute a source region and a drain region of the semiconductor structure, respectively. In addition, the semiconductor structure further includes a plurality of gates structures located within the trenches that surround the nanowire channels in a gate all around configuration.
    Type: Application
    Filed: August 24, 2016
    Publication date: June 15, 2017
    Inventors: Jack O. Chu, Szu Lin Cheng, Isaac Lauer, Kuen-Ting Shiu, Jeng-Bang Yau
  • Patent number: 9679967
    Abstract: A method for forming a semiconductor device includes forming a III-V semiconductor substrate and forming a gate structure on the III-V semiconductor substrate. The method also includes forming a thin spacer surrounding the gate structure and forming a source/drain junction with a first doped III-V material at an upper surface of the III-V semiconductor substrate. The method also includes oxidizing a surface the source/drain forming an oxidation layer; removing natural oxides from the oxidation layer on a surface of the source/drain to expose ions of the first doped material at least at a surface of the source/drain. The method further includes applying a second doping to the source/drain to increase a doping concentration of the first doped III-V material, forming metal contacts at least at the second doped surface of the source/drain; and then annealing the contact.
    Type: Grant
    Filed: September 30, 2016
    Date of Patent: June 13, 2017
    Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Takashi Ando, Kevin K. Chan, John Rozen, Jeng-Bang Yau, Yu Zhu
  • Patent number: 9659655
    Abstract: Semiconductor devices and methods of writing information to a memory cell include an n-type transistor connected to a first terminal. The n-type transistor is formed with a low injection-barrier material gate dielectric. A p-type transistor is connected in serial between the n-type transistor and a second terminal. The p-type transistor is formed with a low injection-barrier material gate dielectric. The first and second transistor share a common floating gate and a common output node.
    Type: Grant
    Filed: September 8, 2016
    Date of Patent: May 23, 2017
    Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Kevin K. Chan, Bahman Hekmatshoartabari, Tak H. Ning, Jeng-Bang Yau
  • Patent number: 9659979
    Abstract: An integrated radiation sensor for detecting the presence of an environmental material and/or condition includes a sensing structure and first and second lateral bipolar junction transistors (BJTs) having opposite polarities. The first lateral BJT has a base that is electrically coupled to the sensing structure and is configured to generate an output signal indicative of a change in stored charge in the sensing structure. The second lateral BJT is configured to amplify the output signal of the first bipolar junction transistor. The first and second lateral BJTs, the sensing structure, and the substrate on which they are formed comprise a monolithic structure.
    Type: Grant
    Filed: October 15, 2015
    Date of Patent: May 23, 2017
    Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Michael S. Gordon, Tak H. Ning, Kenneth P. Rodbell, Jeng-Bang Yau
  • Patent number: 9647099
    Abstract: A method of forming a semiconductor structure includes providing an emitter and a collector on a surface of an insulator layer. The emitter and the collector are spaced apart and have a doping of a first conductivity type. An intrinsic base is formed between the emitter and the collector and on the insulator layer by epitaxially growing the intrinsic base from at least a vertical surface of the emitter and a vertical surface of the collector. The intrinsic base has a doping of a second conductivity type opposite to the first conductivity type, and a first heterojunction exists between the emitter and the intrinsic base and a second heterojunction exists between the collector and the intrinsic base.
    Type: Grant
    Filed: April 13, 2015
    Date of Patent: May 9, 2017
    Assignee: International Business Machines Corporation
    Inventors: Jin Cai, Kevin K. Chan, Christopher P. D'Emic, Tak H. Ning, Jeng-Bang Yau