Patents by Inventor Jeng-Ding Tseng

Jeng-Ding Tseng has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 6542839
    Abstract: An apparatus and a method for calibrating the position of a cassette indexer in a semiconductor process machine are described. The apparatus is constructed by a base plate, a top plate and at least two support members rigidly attaching the top plate to the base plate in a parallel relationship. On the bottom side of the top plate, is mounted at least two spaced-apart rows of distance sensors each having at least five sensors capable of sensing a distance in the cavity of the calibration apparatus. After a wafer blade is extended into the cavity of the apparatus, a sensor in the front row and a sensor in the back row can be used to sense a front-to-back tilt of the wafer blade, while two adjacent sensors in the same row can be used to sense a side-to-side tilt of the wafer blade.
    Type: Grant
    Filed: September 29, 2000
    Date of Patent: April 1, 2003
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd
    Inventors: Hsueh-Chin Lu, Jeng-Ding Tseng, Chi-Wei Chang
  • Patent number: 5913183
    Abstract: A modified air activated pressure valve is described, together with a method for its manufacture, that has a pressure sensitive switch located in the inlet chamber and in the outlet chamber. These pressure sensitive switches are preset by the user to output a finite voltage (typically about 5 volts) only when they are exposed to a pressure that exceeeds some value. The outputs of both switches may then be displayed, as needed. Additionally, a display circuit is provided that gives an output signal only when both the inlet and the outlet chambers are at or above their intended pressures.
    Type: Grant
    Filed: April 7, 1997
    Date of Patent: June 15, 1999
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Tain-Jenn Hu, Jeng-Ding Tseng, Philip J. Lin
  • Patent number: 5811762
    Abstract: A heat pedestal is described for use in a physical vapor deposition/chemical vapor deposition system in which cooling gas, cooling water and heated gas are used to bring a semiconductor wafer to the desired low or high temperature. Use of the apparatus and method described leads to a very rapid transition from one temperature to another. Also achieved is a precise temperature control over a wide range yielding increased flexibility of process control.
    Type: Grant
    Filed: September 25, 1996
    Date of Patent: September 22, 1998
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventor: Jeng-Ding Tseng