Patents by Inventor Jenn-Shiang Shieh

Jenn-Shiang Shieh has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Wafer positioning systems and methods thereof
    Patent number: 7387484
    Abstract: An wafer positioning system comprises a wafer handling chamber with a vacuum sealable opening catching wafers. At least one processing chamber disposed adjacent to the wafer handling chamber has an opening catching wafers, sealed with a gate. A wafer transfer robot with a tray disposed in the wafer handling chamber transports wafers into the processing chambers. A signal receiver is disposed on the front end of the tray. When the tray passes below a wafer, the signal receiver detects wafer position, generating a wafer position signal. A control module receives the wafer position signal through the signal receiver and compares the wafer position signal with a predetermined position signal to correct any misalignment of the wafer.
    Type: Grant
    Filed: December 21, 2005
    Date of Patent: June 17, 2008
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Chih-Chien Ho, Jenn-Shiang Shieh
  • Wafer positioning systems and methods thereof
    Publication number: 20070140826
    Abstract: An wafer positioning system comprises a wafer handling chamber with a vacuum sealable opening catching wafers. At least one processing chamber disposed adjacent to the wafer handling chamber has an opening catching wafers, sealed with a gate. A wafer transfer robot with a tray disposed in the wafer handling chamber transports wafers into the processing chambers. A signal receiver is disposed on the front end of the tray. When the tray passes below a wafer, the signal receiver detects wafer position, generating a wafer position signal. A control module receives the wafer position signal through the signal receiver and compares the wafer position signal with a predetermined position signal to correct any misalignment of the wafer.
    Type: Application
    Filed: December 21, 2005
    Publication date: June 21, 2007
    Inventors: Chih-Chien Ho, Jenn-Shiang Shieh