Patents by Inventor Jennifer Juszczak

Jennifer Juszczak has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and apparatus for minimizing semiconductor wafer contamination
    Patent number: 6695572
    Abstract: A method and apparatus for minimizing the surface contamination of semiconductor wafers (11) during the semiconductor device manufacturing process. Semiconductor wafers (11) are stored in a storage cassette (12) with their face sides (17) facing downward and their back sides (16) facing upward. Particulate contamination present on the back sides of the wafers is thereby secured to the wafers by the force of gravity, and the faces of the wafers are shielded from falling debris. An automated wafer handling device (19) is provided with a rotary joint (22) to accomplish the wafer flipping motion before inserting a wafer into a cassette and after removing the wafer from the cassette.
    Type: Grant
    Filed: September 28, 2001
    Date of Patent: February 24, 2004
    Assignee: Agere Systems Inc.
    Inventors: Michael Antonell, Erik Cho Houge, Larry E. Plew, Catherine Vartuli, Jennifer Juszczak
  • Method and apparatus for minimizing semiconductor wafer contamination
    Publication number: 20030063967
    Abstract: A method and apparatus for minimizing the surface contamination of semiconductor wafers (11) during the semiconductor device manufacturing process. Semiconductor wafers (11) are stored in a storage cassette (12) with their face sides (17) facing downward and their back sides (16) facing upward. Particulate contamination present on the back sides of the wafers is thereby secured to the wafers by the force of gravity, and the faces of the wafers are shielded from falling debris. An automated wafer handling device (19) is provided with a rotary joint (22) to accomplish the wafer flipping motion before inserting a wafer into a cassette and after removing the wafer from the cassette.
    Type: Application
    Filed: September 28, 2001
    Publication date: April 3, 2003
    Inventors: Michael Antonell, Erik Cho Houge, Larry E. Plew, Catherine Vartuli, Jennifer Juszczak