Patents by Inventor Jennifer Rieker

Jennifer Rieker has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20210210352
    Abstract: The variability of an etchant concentration in an immersion processes for treatment of semiconductor devices can be significantly lowered by continuously measuring the conductivity of an etchant solution and comparing against predetermined thresholds. The etchant concentration can be maintained by a feed and bleed process based on conductivity measurements of the etchant solution and the conductivity measurements being correlated with premeasured pH values of an etchant solution.
    Type: Application
    Filed: March 23, 2021
    Publication date: July 8, 2021
    Applicant: NAURA Akrion, Inc.
    Inventors: Ismail Kashkoush, Jennifer Rieker, Gim-Syang Chen, Dennis Nemeth
  • Patent number: 10991589
    Abstract: The variability of an etchant concentration in an immersion processes for treatment of semiconductor devices can be significantly lowered by continuously measuring the conductivity of an etchant solution and comparing against predetermined thresholds. The etchant concentration can be maintained by a feed and bleed process based on conductivity measurements of the etchant solution and the conductivity measurements being correlated with premeasured pH values of an etchant solution.
    Type: Grant
    Filed: December 31, 2018
    Date of Patent: April 27, 2021
    Inventors: Ismail Kashkoush, Jennifer Rieker, Gim-Syang Chen, Dennis Nemeth
  • Publication number: 20190219532
    Abstract: A conductivity sensor, a system for processing flat articles that includes a conductivity sensor, and a method of measuring conductivity of a fluid in a semiconductor processing system. The conductivity sensor includes a probe portion and a data analysis portion that are operably coupled together. The probe portion includes a housing extending along a longitudinal axis, a first tube extending through and protruding from the housing, and a second tube extending through and protruding from the housing. A first toroid surrounds the first tube within the cavity of the housing and a second toroid surrounds the second tube within the cavity of the housing. The first toroid may be operably coupled to an alternating current source of the data analysis portion and the second toroid may be operably coupled to a receiver of the data analysis portion.
    Type: Application
    Filed: January 14, 2019
    Publication date: July 18, 2019
    Inventors: Ismail Kashkoush, Jennifer Rieker, Dennis Nemeth, Robert Benjamin
  • Publication number: 20190148193
    Abstract: The variability of an etchant concentration in an immersion processes for treatment of semiconductor devices can be significantly lowered by continuously measuring the conductivity of an etchant solution and comparing against predetermined thresholds. The etchant concentration can be maintained by a feed and bleed process based on conductivity measurements of the etchant solution and the conductivity measurements being correlated with premeasured pH values of an etchant solution.
    Type: Application
    Filed: December 31, 2018
    Publication date: May 16, 2019
    Applicant: NAURA Akrion, Inc.
    Inventors: Ismail Kashkoush, Jennifer Rieker, Gim-Syang Chen, Dennis Nemeth
  • Patent number: 10170350
    Abstract: The variability of an etchant concentration in an immersion processes for treatment of semiconductor devices can be significantly lowered by continuously measuring the conductivity of an etchant solution and comparing against predetermined thresholds. The etchant concentration can be maintained by a feed and bleed process based on conductivity measurements of the etchant solution and the conductivity measurements being correlated with premeasured pH values of an etchant solution.
    Type: Grant
    Filed: May 4, 2015
    Date of Patent: January 1, 2019
    Inventors: Ismail Kashkoush, Jennifer Rieker, Gim-Syang Chen, Dennis Nemeth
  • Publication number: 20150318224
    Abstract: The variability of an etchant concentration in an immersion processes for treatment of semiconductor devices can be significantly lowered by continuously measuring the conductivity of an etchant solution and comparing against predetermined thresholds. The etchant concentration can be maintained by a feed and bleed process based on conductivity measurements of the etchant solution and the conductivity measurements being correlated with premeasured pH values of an etchant solution.
    Type: Application
    Filed: May 4, 2015
    Publication date: November 5, 2015
    Inventors: ISMAIL KASHKOUSH, Jennifer Rieker, Gim-Syang Chen, Dennis Nemeth
  • Publication number: 20150118785
    Abstract: A method for consistently texturizing silicon wafers dating solar cell wet chemical processing. In one aspect, the invention includes submerging a batch of silicon wafers within a process chamber having an alkaline solution mixture therein. The invention utilizes a feed and bleed technique to bleed chemicals from the process chamber and introduce fresh chemicals into the process chamber to maintain chemical concentrations within a desired range and to maintain etch by-products below a threshold. The alkaline solution etches the silicon wafers to texturize the surfaces of the silicon wafers to form a pattern of pyramids (i.e., texturization pattern) on the surface of the silicon wafers. The feed and bleed technique enables the texturization pattern on the surfaces of the processed wafers and the reflectance of the processed wafers to be consistent among different batches of silicon wafers that are submerged into the alkaline mixture in the process chamber.
    Type: Application
    Filed: May 6, 2013
    Publication date: April 30, 2015
    Inventors: Ismail Kashkoush, Jennifer Rieker, Gim-Syang Chen, Dennis Nemeth
  • Publication number: 20060116313
    Abstract: Compositions for removing residue comprising tannic acid and/or salt thereof and methods using same are described herein.
    Type: Application
    Filed: November 30, 2004
    Publication date: June 1, 2006
    Inventors: Denise Geitz, Jennifer Rieker
  • Publication number: 20060014656
    Abstract: A composition comprising one or more water soluble organic solvents comprising a glycol ether; water; a fluoride containing compound provided that if the fluoride containing compound is ammonium fluoride than no additional fluoride containing compound is added to the composition; optionally a quaternary ammonium compound; and optionally a corrosion inhibitor is disclosed herein that is capable of removing residues from an article such as photoresist and/or etching residue. Also disclosed herein is a method for removing residues from an article using the composition disclosed herein.
    Type: Application
    Filed: June 20, 2005
    Publication date: January 19, 2006
    Inventors: Matthew Egbe, Michael Legenza, Thomas Wieder, Jennifer Rieker
  • Publication number: 20050191714
    Abstract: Methods for identifying an organism with pesticidal activity are provided. The methods comprise binding the proteins expressed by the organism to a substrate (test proteins), contacting the substrate with proteins or lipids expressed by a target pest (target substances), and detecting whether the target substances have bound to the test proteins. This method is useful in rapidly identifying organisms that express proteins with pesticidal activity.
    Type: Application
    Filed: October 20, 2004
    Publication date: September 1, 2005
    Applicant: Athenix Corporation
    Inventors: Michael Koziel, Nicholas Duck, Theodore Kahn, Nadine Carozzi, Jennifer Rieker
  • Publication number: 20050119143
    Abstract: A composition and method using same for removing photoresist and/or processing residue from a substrate are described herein. In one aspect, there is provided a composition for removing residue consisting essentially of: an acidic buffer solution having an acid selected from a carboxylic acid or a polybasic acid and an ammonium salt of the acid in a molar ratio of acid to ammonium salt ranging from 10:1 to 1:10; an organic polar solvent that is miscible in all proportions in water; a fluoride, and water wherein the composition has a pH ranging from about 3 to about 7.
    Type: Application
    Filed: September 15, 2004
    Publication date: June 2, 2005
    Inventors: Matthew Egbe, Jennifer Rieker, Darryl Peters, Irl Ward