Patents by Inventor Jennifer W. Tiller

Jennifer W. Tiller has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Ground shield with reentrant feature
    Patent number: 7718045
    Abstract: The invention generally provides a ground shield for use in a physical vapor deposition (PVD) chamber. In one embodiment, a ground shield includes a generally cylindrical body comprising an outer wall, an inner upper wall, an inner lower wall having a diameter less than a diameter of the inner upper wall and a reentrant feature coupling the upper and inner lower walls. The reentrant feature advantageously prevents arching between the shield and target, which promotes greater process uniformity and repeatability along with longer chamber component service life.
    Type: Grant
    Filed: June 27, 2006
    Date of Patent: May 18, 2010
    Assignee: Applied Materials, Inc.
    Inventors: Jennifer W. Tiller, Anantha Subramani, Michael S. Cox, Keith A. Miller
  • GROUND SHIELD WITH REENTRANT FEATURE
    Publication number: 20070295602
    Abstract: The invention generally provides a ground shield for use in a physical vapor deposition (PVD) chamber. In one embodiment, a ground shield includes a generally cylindrical body comprising an outer wall, an inner upper wall, an inner lower wall having a diameter less than a diameter of the inner upper wall and a reentrant feature coupling the upper and inner lower walls. The reentrant feature advantageously prevents arching between the shield and target, which promotes greater process uniformity and repeatability along with longer chamber component service life.
    Type: Application
    Filed: June 27, 2006
    Publication date: December 27, 2007
    Inventors: Jennifer W. Tiller, Anantha Subramani, Michael S. Cox, Keith A. Miller